Patent Assignment
Reel/Frame 011687/0057
Assignment of Assignor's Interest
Recorded: 2001-04-04
Received: 2001-04-20
Pages: 2
Assignors
HAMAGUCHI, SHINICHI
Executed: 2001-03-27
HARAGUCHI, TAKESHI
Executed: 2001-03-27
YASUDA, HIROSHI
Executed: 2001-03-27
Assignee
ADVANTEST CORPORATION
NERIMA-KU, 1-32-1 ASAHI-CHO, TOKYO, JPX, JAPAN
Covered Property
(1)
Multi-Beam Exposure Apparatus Using a Multi-Axis Electron Lens, Fabrication Method of a Semiconductor Device
Application:
09/824,880 →