Patent Assignment
Reel/Frame 011690/0642
Assignment of Assignor's Interest
Recorded: 2001-04-05
Received: 2001-04-20
Pages: 5
Assignors
NIKO, HIDEO
Executed: 2001-04-02
YAMAGUCHI, TAKAO
Executed: 2001-04-02
YAMASHITA, TAKESHI
Executed: 2001-04-02
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA, JPX, 571-8, JAPAN
Covered Property
(1)
Dry Etching Method, Fabrication Method for Semiconductor Device, and Dry Etching Apparatus
Application:
09/826,098 →