Patent Assignment
Reel/Frame 011694/0640
Assignment of Assignor's Interest
Recorded: 2001-04-13
Pages: 2
Assignors
OHSAWA, YOUICHI
Executed: 2001-02-21
WATANABE, JUN
Executed: 2001-02-21
TAKEDA, TAKANOBU
Executed: 2001-02-21
SEKI, AKIHIRO
Executed: 2001-02-21
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI, 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Chemical Amplification, Positive Resist Compositions