Patent Assignment
Reel/Frame 011695/0916
Assignment of Assignor's Interest
Recorded: 2001-04-04
Received: 2001-04-24
Pages: 2
Assignors
HAMAGUCHI, SHINICHI
Executed: 2001-04-02
HARAGUCHI, TAKESHI
Executed: 2001-04-02
YASUDA, HIROSHI
Executed: 2001-04-02
Assignee
ADVANTEST CORPORATION
1-32-1 ASAHI-CHO NERIMA-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Multi-Beam Exposure Apparatus Using a Multi-Axis Electron Lens, Electron Lens Convergencing a Plurality of Electron Beam and Fabrication Method of a Semiconductor Device
Application:
09/824,874 →