Patent Assignment
Reel/Frame 011720/0671
Assignment of Assignor's Interest
Recorded: 2001-04-11
Received: 2001-04-27
Pages: 2
Assignor
ISHIKAWA, SHIGEO
Executed: 2001-04-03
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Film forming method in which flow rate is switched
Application:
09/832,093 →