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App. No. 09/832,093 · Confirmation No. 8684

Film forming method in which flow rate is switched

Inventor: Shigeo Ishikawa
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2006-03-06 ABN Abandonment 2 View
2006-03-06 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2005-07-06 WFEE Fee Worksheet (SB06) 1 View
2005-07-06 FWCLM Index of Claims 1 View
2005-06-07 CTNF Non-Final Rejection 8 View
2005-06-07 892 List of references cited by examiner 1 View
2005-06-07 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-06-07 FWCLM Index of Claims 1 View
2005-06-07 SRFW Search information including classification, databases and other search related notes 1 View
2005-05-18 A.NE Response After Final Action 1 View
2005-05-18 CLM Claims 3 View
2005-05-18 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-02-22 CTFR Final Rejection 11 View
2005-02-22 FWCLM Index of Claims 1 View
2005-02-10 SRNT Examiner's search strategy and results 3 View
2004-12-20 WFEE Fee Worksheet (SB06) 1 View
2004-12-20 WCLM Claims Worksheet (PTO-2022) 1 View
2004-12-01 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-12-01 CLM Claims 3 View
2004-12-01 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-09-01 CTNF Non-Final Rejection 9 View
2004-09-01 892 List of references cited by examiner 1 View
2004-09-01 FWCLM Index of Claims 1 View
2004-09-01 SRFW Search information including classification, databases and other search related notes 1 View
2004-09-01 SRNT Examiner's search strategy and results 2 View
2004-06-18 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-06-18 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2004-03-31 CTNF Non-Final Rejection 6 View
2004-03-31 892 List of references cited by examiner 1 View
2004-03-31 1449 List of References cited by applicant and considered by examiner 1 View
2004-03-31 FWCLM Index of Claims 1 View
2004-01-29 WFEE Fee Worksheet (SB06) 1 View
2004-01-29 FWCLM Index of Claims 1 View
2004-01-02 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2004-01-02 CLM Claims 3 View
2004-01-02 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2004-01-02 XT/ Extension of Time 1 View
2004-01-02 LET. Miscellaneous Incoming Letter 1 View
2003-12-09 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2003-11-03 CTAV Advisory Action (PTOL-303) 3 View
2003-09-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-30 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-08-01 CTFR Final Rejection 6 View
2003-08-01 892 List of references cited by examiner 1 View
2003-07-29 LET. Miscellaneous Incoming Letter 1 View
2003-07-29 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-07-29 FOR Foreign Reference 12 View
2003-07-23 SRNT Examiner's search strategy and results 3 View
2003-05-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-05-13 CLM Claims 3 View
2003-05-13 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-05-13 LET. Miscellaneous Incoming Letter 3 View
2003-05-13 DRW Drawings-only black and white line drawings 1 View
2003-02-13 CTNF Non-Final Rejection 6 View
2003-02-13 892 List of references cited by examiner 1 View
2003-02-06 SRNT Examiner's search strategy and results 4 View
2003-01-24 A.NE Response After Final Action 4 View
2002-10-28 CTFR Final Rejection 6 View
2002-08-13 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-08-13 CLM Claims 1 View
2002-08-13 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2002-05-23 CTNF Non-Final Rejection 5 View
2002-05-23 892 List of references cited by examiner 1 View
2002-05-23 1449 List of References cited by applicant and considered by examiner 1 View
2002-05-16 SRNT Examiner's search strategy and results 1 View
2001-04-11 TRNA Transmittal of New Application 1 View
2001-04-11 SPEC Specification 13 View
2001-04-11 CLM Claims 4 View
2001-04-11 ABST Abstract 1 View
2001-04-11 DRW Drawings-only black and white line drawings 5 View
2001-04-11 OATH Oath or Declaration filed 1 View
2001-04-11 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-04-11 SRFW Search information including classification, databases and other search related notes 1 View
2001-04-11 FWCLM Index of Claims 1 View
2001-04-11 TRNA Transmittal of New Application 1 View
2001-04-11 DRW Drawings-only black and white line drawings 5 View
2001-04-11 TRNA Transmittal of New Application 1 View
2001-04-11 SPEC Specification 13 View
2001-04-11 CLM Claims 4 View
2001-04-11 ABST Abstract 1 View
2001-04-11 OATH Oath or Declaration filed 1 View
2001-04-11 WFEE Fee Worksheet (SB06) 1 View
2001-04-11 WFEE Fee Worksheet (SB06) 3 View
2001-04-11 WCLM Claims Worksheet (PTO-2022) 1 View
2001-04-11 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-04-11 FOR Foreign Reference 5 View
2001-04-11 FOR Foreign Reference 14 View
2001-04-11 FRPR Certified Copy of Foreign Priority Application 17 View
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Quick Facts
App. No.
09/832,093
Filed
2001-04-11
Pub. No.
US20010031321A1
Art Unit
2823