Patent Assignment
Reel/Frame 011774/0388
Assignment of Assignor's Interest
Recorded: 2001-05-07
Pages: 2
Assignors
IKEDA, KAZUHITO
Executed: 2001-04-21
NISHITANI, EISUKE
Executed: 2001-04-16
SAKUMA, HARUNOBU
Executed: 2001-04-09
NAKAGOMI, KAZUHIRO
Executed: 2001-04-09
Assignee
HITACHI KOKUSAI ELECTRIC INC
NAKANO-KU, 14-20, 3-CHOME HIGASHI-NAKANO, TOKYO 164-8511, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.