IP Library › Assignment 048008/0206
Patent Assignment
Reel/Frame 048008/0206

Assignment of Assignor's Interest

Recorded: 2018-12-31 Pages: 23
Assignor
HITACHI KOKUSAI ELECTRIC INC.
Executed: 2018-12-05
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Properties (350)
Plasma Generation Apparatus
Patent: 6,238,512 →
Application: 09/234,488 →
Plasma Generating Apparatus and Semiconductor Manufacturing Method
Patent: 6,380,684 →
Application: 09/573,253 →
Hydrogen Annealing Process and Apparatus Therefor
Patent: 6,527,884 →
Application: 09/708,204 →
Plasma Processing Apparatus
Patent: 6,727,654 →
Application: 09/756,873 →
Publication: US 2002/0047536
Method and Apparatus for Manufacturing Semiconductor Device
Patent: 6,555,421 →
Application: 09/758,238 →
Publication: US 2001/0008782
Substrate Processing Apparatus and Substrate Processing Method
Patent: 6,875,280 →
Application: 09/780,951 →
Publication: US 2001/0025600
Method and Apparatus for Manufacturing Semiconductor Devices
Patent: 6,548,404 →
Application: 09/819,653 →
Publication: US 2001/0026963
Semiconductor Manufacturing Method, Substrate Processing Method, and Semiconductor Manufacturing Apparatus
Patent: 6,828,235 →
Application: 09/819,690 →
Publication: US 2002/0020344
Substrate Processing Apparatus
Patent: 6,540,465 →
Application: 09/823,280 →
Publication: US 2001/0052325
Dual Loading Port Semiconductor Processing Equipment
Patent: 6,641,350 →
Application: 09/834,913 →
Publication: US 2001/0038783
Semiconductor Manufacturing Apparatus, Remote Control System Therefor, and Remote Operation Device
Patent: 7,225,046 →
Application: 09/901,577 →
Publication: US 2002/0064138
Substrate Processing Apparatus
Patent: 6,540,469 →
Application: 09/945,643 →
Publication: US 2002/0037210
Method of Manufacturing Semiconductor Devices
Patent: 6,576,481 →
Application: 09/962,112 →
Publication: US 2002/0072211
Method and Apparatus for Processing Substrates and Method for Manufacturing a Semiconductor Device
Patent: 6,638,860 →
Application: 09/963,382 →
Publication: US 2002/0037645
Methods of Manufacturing Semiconductor Devices with Ruthenium Films Formed by Cvd Using an Oxygen-Containing Reactant Gas
Patent: 6,461,961 →
Application: 09/963,665 →
Publication: US 2002/0055254
Temperature Controlling Method, Thermal Treating Apparatus, and Method of Manufacturing Semiconductor Device
Patent: 6,746,908 →
Application: 09/964,863 →
Publication: US 2002/0055080
Substrate Processing Apparatus and Semiconductor Device Manufacturing Method
Patent: 6,541,344 →
Application: 09/981,629 →
Publication: US 2002/0072165
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device
Patent: 6,503,079 →
Application: 10/041,617 →
Publication: US 2002/0094502
System for Supplying Semiconductor Manufacturing System Control Programs
Patent: 7,472,387 →
Application: 10/050,101 →
Publication: US 2002/0111708
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device
Patent: 6,482,753 →
Application: 10/095,072 →
Publication: US 2002/0168854
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 6,495,473 →
Application: 10/098,472 →
Publication: US 2002/0168877
Method for Fabricating a Semiconductor Device
Patent: 6,872,636 →
Application: 10/100,922 →
Publication: US 2002/0168866
Method for Manufacturing Semiconductor Device Having an Etching Treatment
Patent: 6,664,184 →
Application: 10/175,471 →
Publication: US 2003/0017701
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device
Patent: 6,863,734 →
Application: 10/197,398 →
Publication: US 2003/0022402
Substrate Processing Apparatus and Semiconductor Device Producing Method
Patent: 6,864,463 →
Application: 10/210,558 →
Publication: US 2003/0027364
Temperature Control Method and Semiconductor Device Manufacturing Method
Patent: 6,767,752 →
Application: 10/212,146 →
Publication: US 2003/0040198
Method for Fabricating a Semiconductor Device and a Substrate Processing Apparatus
Patent: 6,686,281 →
Application: 10/234,520 →
Publication: US 2003/0119288
Fabrication of B-Doped Silicon Film by Lpcvd Method Using BCI3 and SIH4 Gases
Patent: 6,905,963 →
Application: 10/255,715 →
Publication: US 2003/0077920
Method for Fabricating a Semiconductor Device and a Substrate Processing Apparatus
Patent: 6,720,274 →
Application: 10/291,474 →
Publication: US 2003/0092283
Apparatus for Fabricating a Semiconductor Device
Patent: 7,077,913 →
Application: 10/345,190 →
Publication: US 2003/0150386
Method of Manufacturing a Semiconductor Device and a Semiconductor Manufacture System
Patent: 6,949,474 →
Application: 10/359,127 →
Publication: US 2004/0007185
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 6,884,738 →
Application: 10/372,245 →
Publication: US 2003/0181060
Method for Manufacturing Semiconductor Device
Patent: 6,790,793 →
Application: 10/375,130 →
Publication: US 2003/0224615
Method for Manufacturing Semiconductor Device
Patent: 6,787,481 →
Application: 10/375,131 →
Publication: US 2004/0009678
Heat Treatment Apparatus and Method for Processing Substrates
Patent: 6,737,613 →
Application: 10/395,179 →
Publication: US 2003/0183614
Vertical Type Semiconductor Device Producing Apparatus
Patent: 6,905,549 →
Application: 10/411,092 →
Publication: US 2003/0213435
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 6,825,126 →
Application: 10/422,859 →
Publication: US 2004/0043544
Substrate Treating Apparatus and Method for Manufacturing Semiconductor Device
Patent: 7,737,034 →
Application: 10/517,765 →
Publication: US 2006/0205213
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 7,524,766 →
Application: 10/521,248 →
Publication: US 2005/0250341
Thermal Treatment Apparatus, Method for Manufacturing Semiconductor Device, and Method for Manufacturing Substrate
Patent: 7,667,301 →
Application: 10/528,069 →
Publication: US 2007/0194411
Substrate Processing Apparatus and Method for Manufacturing a Semiconductor Device
Patent: 8,057,599 →
Application: 10/528,137 →
Publication: US 2006/0150904
Container, Container Producing Method, Substrate Processing Device, and Semiconductor Device Producing Method
Patent: 7,824,496 →
Application: 10/548,877 →
Publication: US 2007/0170088
Producing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 7,534,730 →
Application: 10/549,938 →
Publication: US 2007/0157882
Substrate Processing Equipment
Patent: 7,346,273 →
Application: 10/550,202 →
Publication: US 2006/0188240
Manufacturing Method of Semiconductor Device, and Substrate Processing Apparatus
Patent: 7,494,941 →
Application: 10/571,349 →
Publication: US 2007/0032045
Substrate Processing Apparatus
Patent: 7,958,842 →
Application: 10/571,898 →
Publication: US 2008/0153308
Producing Method of a Semiconductor Device Using Cvd Processing
Patent: 7,955,991 →
Application: 10/572,396 →
Publication: US 2007/0259532
Substrate Processing Apparatus , Substrate Holder, and Manufacturing Method of Semiconductor Device
Patent: 7,455,734 →
Application: 10/574,568 →
Publication: US 2007/0007646
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 7,531,467 →
Application: 10/574,571 →
Publication: US 2007/0042581
Method of Manufacturing Semiconductor Device and Apparatus for Processing Substrate
Patent: 7,556,839 →
Application: 10/587,500 →
Publication: US 2007/0178669
Semiconductor Manufacturing Device and Method for Manufacturing Semiconductor Devices
Patent: 8,197,638 →
Application: 10/589,490 →
Publication: US 2008/0017111
Substrate Processing Apparatus
Patent: 7,491,662 →
Application: 10/590,521 →
Publication: US 2007/0184636
Substrate Processing Apparatus and Semiconductor Device Producing Method
Patent: 7,950,348 →
Application: 10/592,348 →
Publication: US 2008/0153309
Substrate Processing Apparatus and Manufacturing Method for a Semiconductor Device
Patent: 9,111,972 →
Application: 10/593,282 →
Publication: US 2008/0236488
Method and Apparatus for Processing Substrates and Method for Manufacturing a Semiconductor Device
Patent: 6,927,165 →
Application: 10/674,345 →
Publication: US 2004/0177926
Semiconductor Device and Manufacturing Method Thereof
Patent: 7,112,819 →
Application: 10/829,300 →
Publication: US 2005/0001212
Substrate Processing Method
Patent: 7,003,219 →
Application: 10/915,463 →
Publication: US 2005/0008352
Substrate Processing Method
Patent: 7,553,518 →
Application: 11/296,440 →
Publication: US 2006/0081334
Semiconductor Device and Manufacturing Method of the Same
Patent: 7,501,347 →
Application: 11/446,137 →
Publication: US 2006/0281298
Substrate Processing Apparatus, and Method for Manufacturing Semiconductor Device
Patent: 7,648,578 →
Application: 11/547,137 →
Heat Treating Apparatus
Patent: 7,865,070 →
Application: 11/578,963 →
Publication: US 2008/0267598
Heat Treatment Apparatus and Method of Manufacturing Substrate
Patent: 7,891,975 →
Application: 11/658,160 →
Publication: US 2007/0297876
Substrate Treatment Apparatus
Patent: 8,257,013 →
Application: 11/662,198 →
Publication: US 2008/0019809
Heat Treatment Apparatus and Method of Manufacturing Substrates
Patent: 8,963,051 →
Application: 11/662,573 →
Publication: US 2008/0190910
Semiconductor Manufacturing Apparatus and Manufacturing of a Semiconductor Device
Patent: 7,751,922 →
Application: 11/662,631 →
Publication: US 2008/0127467
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 7,579,276 →
Application: 11/663,179 →
Publication: US 2007/0264840
Temperature Regulating Method, Thermal Processing System and Semiconductor Device Manufacturing Method
Patent: 7,577,493 →
Application: 11/663,198 →
Publication: US 2008/0046110
Producing Method of Semiconductor Device
Patent: 7,795,156 →
Application: 11/664,287 →
Publication: US 2007/0298622
Substrate Processing Apparatus and Producing Method of Semiconductor Device
Patent: 7,892,983 →
Application: 11/664,726 →
Publication: US 2008/0166882
Substrate Treating Apparatus and Semiconductor Device Manufacturing Method
Patent: 7,731,797 →
Application: 11/665,217 →
Publication: US 2008/0134977
Production Method for Semiconductor Device and Substrate Processing Apparatus
Patent: 7,779,785 →
Application: 11/666,360 →
Publication: US 2008/0124945
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus
Patent: 8,293,646 →
Application: 11/667,078 →
Publication: US 2009/0117752
Batch-Type Remote Plasma Processing Apparatus
Patent: 8,028,652 →
Application: 11/688,730 →
Publication: US 2007/0246355
Semiconductor Device Manufacturing Method and Semiconductor Manufacturing Apparatus
Patent: 7,432,215 →
Application: 11/762,033 →
Publication: US 2007/0238292
Substrate Processing Apparatus
Patent: 8,453,600 →
Application: 11/792,864 →
Publication: US 2009/0071405
Substrate Processing Apparatus and Semiconductor Device Producing Method
Patent: 8,251,012 →
Application: 11/885,483 →
Publication: US 2008/0286980
Semiconductor Device Manufacturing Apparatus and Manufacturing Method of Semiconductor Device
Patent: 8,172,946 →
Application: 11/885,551 →
Publication: US 2008/0166881
Manufacturing Method of a Semiconductor Device, and Substrate Processing Apparatus
Patent: 7,713,883 →
Application: 11/885,869 →
Publication: US 2008/0124943
Substrate Processing Method and Substrate Processing Apparatus
Patent: 8,066,894 →
Application: 11/886,529 →
Publication: US 2008/0138994
Heat-Treating Apparatus and Method of Producing Substrates
Patent: 7,901,206 →
Application: 11/887,004 →
Publication: US 2009/0016854
Semiconductor Device Producing Method, Substrate Producing Method and Substrate Processing Apparatus
Patent: 8,268,731 →
Application: 11/887,347 →
Publication: US 2010/0029092
Substrate Processing System
Patent: 8,560,107 →
Application: 11/892,367 →
Publication: US 2008/0086229
Manufacturing Method of Semiconductor Device and Semiconductor Device Manufacturing Apparatus
Patent: 7,651,954 →
Application: 11/896,231 →
Publication: US 2008/0124941
Substrate Processing Apparatus and Attaching/Detaching Method of Reaction Vessel
Patent: 8,172,947 →
Application: 11/902,154 →
Publication: US 2008/0083109
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 8,123,858 →
Application: 11/902,288 →
Publication: US 2008/0090389
Substrate processing apparatus
Patent: 8,806,370 →
Application: 11/905,582 →
Publication: US 2008/0178119
Substrate Processing Apparatus, Method of Manufacturing a Semiconductor Device, and Method of Forming a Thin Film on Metal Surface
Patent: 7,879,400 →
Application: 11/907,270 →
Publication: US 2008/0090415
Semiconductor Device Producing Method with Selective Epitaxial Growth
Patent: 8,466,049 →
Application: 11/921,562 →
Publication: US 2009/0104740
Manufacturing Method of Semiconductor Device, and Substrate Processing Apparatus
Patent: 8,435,905 →
Application: 11/921,936 →
Publication: US 2009/0035947
Batch-Type Remote Plasma Processing Apparatus
Patent: 7,861,668 →
Application: 11/931,585 →
Publication: US 2008/0066681
Substrate Processing Apparatus and Reaction Container
Patent: 8,047,158 →
Application: 11/933,169 →
Publication: US 2008/0251014
Substrate Processing Apparatus and Reaction Container
Patent: 7,900,580 →
Application: 11/933,208 →
Publication: US 2008/0121180
Substrate processing apparatus for semiconductor devices
Patent: 9,460,945 →
Application: 11/976,949 →
Publication: US 2008/0105204
Method for Manufacturing Semiconductor Device Background
Patent: 7,662,727 →
Application: 11/979,707 →
Publication: US 2008/0132084
Substrate Processing Apparatus and Substrate Processing Method
Patent: 7,767,053 →
Application: 11/984,186 →
Publication: US 2008/0075640
Substrate Processing Apparatus and Manufacturing Method for Semiconductor Devices
Patent: 8,128,333 →
Application: 11/984,589 →
Publication: US 2008/0134483
Substrate Processing Apparatus Having Gas Side Flow via Gas Inlet
Patent: 7,700,054 →
Application: 11/987,493 →
Publication: US 2008/0153314
Substrate Processing Apparatus Having Covered Thermocouple for Enhanced Temperature Control
Patent: 7,820,118 →
Application: 11/989,484 →
Publication: US 2009/0111285
Substrate Processing Apparatus and Semiconductor Device Producing Method
Patent: 8,246,749 →
Application: 11/989,488 →
Publication: US 2009/0311873
Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semiconductor Device Manufacturing Method
Patent: 8,148,271 →
Application: 11/989,698 →
Publication: US 2009/0291566
Substrate Processing Apparatus
Patent: 8,240,271 →
Application: 11/990,340 →
Publication: US 2009/0120365
Substrate Processing Apparatus
Patent: 8,176,871 →
Application: 11/990,445 →
Publication: US 2009/0151632
Semiconductor Device Producing Method
Patent: 7,767,594 →
Application: 11/990,451 →
Publication: US 2009/0104792
Substrate Processing System
Patent: 8,506,714 →
Application: 11/990,499 →
Publication: US 2008/0302302
Substrate Processing Apparatus, Heating Apparatus for Use in the Same, Method of Manufacturing Semiconductors with Those Apparatuses, and Heating Element Supporting Structure
Patent: 7,863,204 →
Application: 11/990,519 →
Publication: US 2009/0035948
Substrate Processing Apparatus and Semiconductor Device Producing Method
Patent: 8,172,950 →
Application: 11/990,696 →
Publication: US 2009/0017641
Substrate Processing Method and Semiconductor Manufacturing Apparatus
Patent: 7,727,780 →
Application: 12/010,274 →
Publication: US 2008/0182345
Substrate Processing Method for Film Formation
Patent: 7,713,582 →
Application: 12/039,686 →
Publication: US 2008/0160214
Manufacturing Method of Semiconductor Apparatus
Patent: 8,282,733 →
Application: 12/060,511 →
Publication: US 2008/0245303
Substrate Processing Apparatus
Patent: 8,510,790 →
Application: 12/073,787 →
Publication: US 2008/0229386
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device
Patent: 8,235,001 →
Application: 12/076,508 →
Publication: US 2008/0264337
Substrate Processing System and Group Management System
Patent: 7,813,828 →
Application: 12/076,824 →
Publication: US 2008/0243296
Substrate Processing System and Data Retrieval Method
Patent: 7,895,207 →
Application: 12/078,188 →
Publication: US 2008/0256456
Manufacturing Method of Semiconductor Device
Patent: 8,012,885 →
Application: 12/078,527 →
Publication: US 2008/0242064
A Method of Manufacturing a Semiconductor Device
Patent: 7,975,376 →
Application: 12/081,200 →
Publication: US 2008/0193274
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus
Patent: 7,968,437 →
Application: 12/084,141 →
Publication: US 2009/0130859
Substrate Processing Apparatus
Patent: 8,600,539 →
Application: 12/084,886 →
Publication: US 2009/0018692
Substrate Processing Method and Substrate Processing Apparatus
Patent: 8,133,820 →
Application: 12/086,285 →
Publication: US 2009/0258506
Substrate Processing Apparatus
Patent: 8,555,808 →
Application: 12/086,632 →
Publication: US 2009/0255468
Substrate Processing Apparatus and Substrate Processing Method
Patent: 8,501,599 →
Application: 12/087,479 →
Publication: US 2009/0029486
Semiconductor Device Producing Method and Substrate Processing Apparatus
Patent: 7,981,815 →
Application: 12/087,779 →
Publication: US 2009/0053906
Semiconductor Producing Device and Semiconductor Device Producing Method
Patent: 7,842,160 →
Application: 12/153,101 →
Publication: US 2008/0223524
Manufacturing Method of a Semiconductor Device and Substrate Processing Apparatus
Patent: 7,709,276 →
Application: 12/155,221 →
Publication: US 2008/0305633
Method of Producing a Semiconductor Device
Patent: 7,622,396 →
Application: 12/155,625 →
Publication: US 2008/0250619
Semiconductor Device Manufacturing Method
Patent: 8,367,560 →
Application: 12/155,773 →
Publication: US 2008/0318442
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus
Patent: 7,858,534 →
Application: 12/187,644 →
Publication: US 2009/0042408
Manufacturing Method of Semiconductor Device, and Semiconductor Device
Patent: 8,093,159 →
Application: 12/201,606 →
Publication: US 2009/0278235
Substrate Processing Apparatus and Manufacturing Method of a Semiconductor Device
Patent: 8,277,161 →
Application: 12/213,679 →
Publication: US 2009/0003977
Heating Apparatus, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Devices
Patent: 8,116,618 →
Application: 12/213,823 →
Publication: US 2009/0016706
Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator
Patent: 9,184,069 →
Application: 12/213,824 →
Publication: US 2009/0014435
Heating Apparatus, Substrate Processing Apparatus Employing the Same, Method of Manufacturing Semiconductor Devices, and Extending Member
Patent: 8,158,911 →
Application: 12/213,825 →
Publication: US 2009/0014428
Method of Manufacturing a Semiconductor Device and Processing Apparatus
Patent: 8,481,434 →
Application: 12/216,596 →
Publication: US 2009/0130860
Substrate processing apparatus
Patent: 8,443,484 →
Application: 12/222,653 →
Publication: US 2009/0044749
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 8,304,328 →
Application: 12/223,718 →
Publication: US 2009/0087964
Substrate Processing Apparatus and Semiconductor Device Manufacturing Method
Patent: 8,012,888 →
Application: 12/223,866 →
Publication: US 2009/0203229
Temperature Adjustment Method
Patent: 8,367,975 →
Application: 12/224,436 →
Publication: US 2009/0107978
Substrate Processing System
Patent: 8,438,655 →
Application: 12/224,808 →
Publication: US 2009/0292374
Substrate Processing Apparatus
Patent: 8,014,887 →
Application: 12/224,858 →
Publication: US 2009/0024238
Method of Manufacturing Semiconductor Device Including Removal of Deposits from Process Chamber and Supply Portion
Patent: 8,679,989 →
Application: 12/224,879 →
Publication: US 2009/0305517
Device for Processing Substrate and Method of Manufacturing Semiconductor Device
Patent: 7,682,987 →
Application: 12/225,118 →
Publication: US 2009/0170337
Substrate Processing System and Operation Inspecting Method
Patent: 8,266,095 →
Application: 12/225,390 →
Publication: US 2010/0223277
Substrate Treatment Device and Manufacturing Method of Semiconductor Device
Patent: 7,795,157 →
Application: 12/225,432 →
Publication: US 2009/0170338
Substrate Processing Apparatus and Manufacturing Method of Semiconductor Device
Patent: 7,795,143 →
Application: 12/226,323 →
Publication: US 2009/0163040
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 8,026,159 →
Application: 12/230,396 →
Publication: US 2009/0061648
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 8,193,083 →
Application: 12/230,782 →
Publication: US 2009/0064931
Temperature Control Method, Method of Obtaining a Temperature Correction Value, Method of Manufacturing a Semiconductor Device and Substrate Treatment Apparatus
Patent: 8,380,360 →
Application: 12/232,007 →
Publication: US 2009/0105867
Delay Adjusting Method and Lsi That Uses Air-Gap Wiring
Patent: 8,122,405 →
Application: 12/253,469 →
Publication: US 2009/0106718
Substrate Processing Apparatus
Patent: 8,070,880 →
Application: 12/255,246 →
Publication: US 2009/0116936
Substrate Processing Apparatus and Substrate Processing Method
Patent: 8,112,183 →
Application: 12/260,211 →
Publication: US 2009/0192652
Method for Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 8,609,551 →
Application: 12/318,131 →
Publication: US 2009/0170345
Semiconductor Device and Manufacturing Method of the Same
Patent: 7,911,055 →
Application: 12/320,357 →
Publication: US 2009/0142919
Substrate Processing Method and Substrate Processing Apparatus
Patent: 8,334,215 →
Application: 12/320,767 →
Publication: US 2009/0169768
Batch-Type Remote Plasma Processing Apparatus
Patent: 8,020,514 →
Application: 12/357,213 →
Publication: US 2009/0133630
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Process Tube
Patent: 8,303,712 →
Application: 12/363,045 →
Publication: US 2009/0197402
Substrate Processing Apparatus
Patent: 8,297,224 →
Application: 12/363,928 →
Publication: US 2009/0197425
Substrate processing apparatus and method for manufacturing semiconductor device
Patent: 8,828,141 →
Application: 12/379,420 →
Publication: US 2009/0223448
Method for manufacturing semiconductor device and substrate processing apparatus
Patent: 9,856,560 →
Application: 12/379,471 →
Publication: US 2009/0170328
Substrate Processing Apparatus and Method for Manufacturing a Semiconductor Device
Patent: 8,043,431 →
Application: 12/382,082 →
Publication: US 2009/0188431
Substrate processing apparatus
Patent: 8,795,433 →
Application: 12/382,222 →
Publication: US 2009/0229518
Method of Manufacturing Semiconductor Device and Apparatus for Processing Substrate
Patent: 8,221,835 →
Application: 12/382,275 →
Publication: US 2009/0181523
Method of Manufacturing Semiconductor Device and Apparatus for Processing Substrate
Patent: 8,227,030 →
Application: 12/382,276 →
Publication: US 2009/0181524
Substrate processing apparatus
Patent: 8,875,656 →
Application: 12/382,331 →
Publication: US 2009/0241835
Substrate processing method and film forming method
Patent: 8,507,296 →
Application: 12/382,343 →
Publication: US 2009/0197352
Substrate Processing Apparatus and Substrate Processing System
Patent: 8,271,119 →
Application: 12/382,350 →
Publication: US 2009/0235865
Substrate Processing Apparatus
Patent: 8,092,603 →
Application: 12/382,403 →
Publication: US 2009/0178619
Temperature Regulating Method, Thermal Processing System and Semiconductor Device Manufacturing Method
Patent: 7,930,059 →
Application: 12/382,545 →
Publication: US 2009/0187268
Method of Manufacturing a Semiconductor Device
Patent: 8,420,167 →
Application: 12/382,618 →
Publication: US 2009/0191718
Batch-Type Remote Plasma Processing Apparatus
Patent: 8,544,411 →
Application: 12/390,291 →
Publication: US 2009/0159440
Producing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 7,871,938 →
Application: 12/403,974 →
Publication: US 2009/0239387
Producing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 8,084,369 →
Application: 12/404,003 →
Publication: US 2009/0233452
Producing Method of Semiconductor Device and Substrate Processing Apparatus
Patent: 8,636,882 →
Application: 12/404,915 →
Publication: US 2009/0239386
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 8,293,592 →
Application: 12/410,836 →
Publication: US 2009/0263971
Substrate Processing Method and Substrate Processing Apparatus
Patent: 7,851,379 →
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Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
Patent: 9,831,082 →
Application: 15/013,721 →
Publication: US 2016/0155634
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,831,083 →
Application: 15/023,232 →
Publication: US 2016/0233085
Method of Manufacturing Semiconductor Device Including Silicon Nitride Layer for Inhibiting Excessive Oxidation of Polysilicon Film
Application: 15/042,648 →
Publication: US 2016/0172191
Method of Manufacturing Semiconductor Device
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Method of Manufacturing Semiconductor Device
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Publication: US 2016/0284539
Method of Manufacturing Semiconductor Device and Substrate Processing Method
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Publication: US 2016/0365243
Method of Manufacturing Semiconductor Device
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Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
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Method of Manufacturing Semiconductor Device
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Reaction Tube
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Related Assignments (21)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Jan 21, 1999
From: LI, YUNLONG; SATO, NORIYOSHI; IIZUKA, SATORU
To: KOKUSAI ELECTRIC CO., LD.; SATO, NORIYOSHI
Reel/Frame 009718/0380 →
Assignment of Assignor's Interest Sep 18, 2000
From: LI, YUNLONG; SATO, MASANOBU; TOMINAGA, YOSHIO; SATO, NORIYOSHI
To: KOKUSAI ELECTRIC CO., LTD.; SATO, NORIYOSHI
Reel/Frame 011081/0098 →
Change of Name Oct 25, 2000
From: KOKUSAI ELECTRIC CO., LTD.
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 011276/0794 →
Assignment of Assignor's Interest Nov 8, 2000
From: TAKAKUWA, YASUNORI; TOMETSUKA, KOUJI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 011367/0593 →
Assignment of Assignor's Interest Mar 9, 2001
From: MATSUYAMA, NAOKO; SASAKI, SINYA
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 011573/0068 →
Invalid Assignment, See Recording at Reel 012591, Frame 0894. (Re-Recorded to Correct the Recordation Date) Mar 20, 2001
From: OGAWA, UNRYU; SATO, TAKAYUKI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 011634/0618 →
Assignment of Assignor's Interest Mar 26, 2001
From: OGAWA, UNRYU; SATO, TAKAYUKI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 012591/0894 →
Assignment of Assignor's Interest Mar 29, 2001
From: ITATANI, HIDEHARU; TSUNEDA, MASAYUKI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 011660/0286 →
Assignment of Assignor's Interest May 7, 2001
From: IKEDA, KAZUHITO; NISHITANI, EISUKE; SAKUMA, HARUNOBU; NAKAGOMI, KAZUHIRO
To: HITACHI KOKUSAI ELECTRIC INC
Reel/Frame 011774/0388 →
Assignment of Assignor's Interest May 9, 2001
From: TAKANO, SATOSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 011780/0538 →
Assignment of Assignor's Interest Jun 18, 2001
From: NAKASHIMA, TAKANOBU; MATSUNAGA, TATSUHISA; YANAGAWA, HIDEHIRO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 011905/0518 →
Assignment of Assignor's Interest Jul 12, 2001
From: TOMETSUKA, KOUJI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 011980/0984 →
Assignment of Assignor's Interest Sep 26, 2001
From: ITATANI, HIDEHARU; TSUNEDA, MASAYUKI; SANO, ATSUSHI; OHOKA, TSUKASA
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 012201/0074 →
Assignment of Assignor's Interest Oct 25, 2001
From: SAITO, TSUYOSHI; YOKOGAWA, KAZUHIRO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 012611/0247 →
Assignment of Assignor's Interest Dec 5, 2001
From: MATSUNAGA, TATSUHISA; NOTO, KOUICHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 012344/0294 →
Assignment of Assignor's Interest Dec 5, 2001
From: MATSUNAGA, TATSUHISA; TERAMOTO, MASAHIRO; AKUTSU, NORIO; NOTO, KOUICHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 012347/0960 →
Corrective Assignment to Correct the Assignee's Name, Previously Recorded at Reel 0112207 Frame 0784. Dec 18, 2001
From: YUMURA, TAKASHI; ARAKI, HIROSHI
To: MITSUBISHI DENKI KABUSHIKI KAISHA
Reel/Frame 012377/0917 →
Assignment of Assignor's Interest Dec 21, 2001
From: TANAKA, KAZUO; UENO, MASAAKI; NAKANO, MINORU; YAMAGUCHI, HIDETO
To: HITACHI KOKUSAI ELECTRIC, INC.
Reel/Frame 012395/0931 →
Assignment of Assignor's Interest Dec 28, 2001
From: SANO, ATSUSHI; OHOKA, TSUKASA
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 012398/0534 →
Assignment of Assignor's Interest Feb 1, 2002
From: KASANAMI, KATSUHISA; NISHITANI, EISUKE; NISHIWAKI, MICHIKO; OKADA, SATOSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 012578/0698 →
Assignment of Assignor's Interest Mar 14, 2002
From: KOGANO, MINORU; INOKUCHI, YASUHIRO; SAMBU, MAKOTO; MORIYA, ATSUSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 012674/0755 →