Substrate processing system and group management system
View Patent ↗It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses. The substrate processing system according to this invention has a plurality of substrate processing apparatuses for processing substrates and the group management system connected to the substrate processing apparatuses, and the group management system includes a structure information memory device (structure management device) for memorizing structure information, a plurality of communication devices (connection management devices) for communicating with at least one of the plural substrate processing apparatuses based on the structure information memorized in the structure information memory device, and an apparatus information storage device (data management device) connected to any of the plural communication devices based on the structure information memorized in the structure information memory device and which stores information relating to the substrate processing apparatus performing communication with the communication device.
1. A substrate processing system comprising:
a plurality of substrate processing apparatuses for processing substrates and
a group management system connected to the substrate processing apparatuses, wherein
the group management system comprises:
a structure information memory device for memorizing structure information defining a connection structure;
a plurality of communication devices each of which communicates with at least one of the plurality of substrate processing apparatuses based on the structure information; and
an apparatus information storage device connected to any of the plurality of communication devices based on the structure information and stores information relating to each of the plurality of substrate processing apparatuses communicating with any of the plurality of communication devices,
wherein the structure information comprises maxim connection numbers each indicating a maximum number of each of the structure information memory device, the plurality of communication devices, and the apparatus information storage device that can be connected to one another.
2. The substrate processing system according to claim 1 , wherein
the structure information comprises a connection relationship among the plurality of substrate processing apparatuses, the structure information memory device, the plurality of communication devices, and the apparatus information storage device.
3. The substrate processing system according to claim 1 ,
wherein the structure information memory device stores information relating to the plurality of substrate processing apparatuses and different from the information stored in the apparatus information storage device.
4. The substrate processing system according to claim 1 , further comprising
a display unit for displaying the information relating to the plurality of substrate processing apparatuses included in the structure information.
5. The substrate processing system according to claim 1 , further comprising
an instruction unit for instructing reflection of the changed structure information and notification to the plurality of communication devices.
6. A group management system connected to a plurality of substrate processing apparatuses for processing substrates, comprising:
a structure information memory device for memorizing structure information defining a connection structure in the group management system;
a plurality of communication devices each of which communicates with at least one of the plurality of substrate processing apparatuses based on the structure information; and
an apparatus information storage device connected to any of the plurality of communication devices based on the structure information and which stores information relating to each of the plurality of substrate processing apparatuses communicating with any of the plurality of communication devices,
wherein the structure information comprises maxim connection numbers each indicating a maximum number of each of the structure information memory device, the plurality of communication devices, and the apparatus information storage device that can be connected to one another.
7. The group management system according to claim 6 , wherein
the structure information indicates a connection relationship at least among the apparatus information storage device, the structure information memory device, the plurality of communication devices, and the plurality of substrate processing devices.
8. The group management system according to claim 6 , wherein
the structure information memory device stores information relating to the plurality of substrate processing apparatuses and different from the information stored in the apparatus information storage device.