Patent Assignment
Reel/Frame 020994/0983
Assignment of Assignor's Interest
Recorded: 2008-05-21
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing System and Group Management System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.