Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate
View Patent ↗A thermal treatment apparatus, a method for manufacturing a semiconductor device, and a method for manufacturing a substrate, wherein the occurrence of slip dislocation in a substrate during heat treatment is reduced, and a high-quality semiconductor device can be manufactured, are intended to be provided. A substrate support 30 is formed from a main body portion 56 and a supporting portion 58 . In the main body portion 56 , a plurality of placing portions 66 extend parallel, and supporting portions 58 are provided on the placing portions 66 . A substrate 68 is placed on the supporting portion 58 . The supporting portion 58 has a smaller area than an area of a flat face of the substrate, and is formed from a silicon plate having a thickness larger than thickness of the substrate, so that deformation during heat treatment is reduced. The supporting portion 58 is made of silicon, and a layer coated with silicon carbide (SiC) is formed on a substrate-placing face of the supporting portion 58.
1. A thermal treatment apparatus comprising:
a furnace for heat-treating a substrate; and
a substrate support for supporting the substrate in the furnace,
wherein the substrate support has a main body portion and a supporting portion provided on the main body portion, the supporting portion being in contact with the substrate,
the supporting portion is formed from a silicon plate-like member,
a thickness of the supporting portion is not less than 3 mm and not more than 10 mm, and
the supporting portion is not in contact with a periphery of the substrate.
2. The thermal treatment apparatus according to claim 1 , wherein a substrate-placing face of the supporting portion, on which the substrate is placed, is coated with an amorphous silicon oxide film.
3. A thermal treatment apparatus comprising:
a furnace for heat-treating a substrate, and
a substrate support for supporting the substrate in the furnace,
wherein the substrate support has a main body portion and a supporting portion provided on the main body portion, the supporting portion being in contact with the substrate,
the supporting portion is formed from a silicon plate-like member,
a thickness of the supporting portion is not less than 3 mm and not more than 10 mm,
the supporting portion is not in contact with a periphery of the substrate, and
a substrate-placing face of the supporting portion, on which the substrate is placed, is coated with a film or films comprising one or more materials including silicon carbide, silicon nitride, polycrystalline silicon, silicon oxide, glassy carbon, and microcrystalline diamond.
4. The thermal treatment apparatus according to claim 3 , wherein an uppermost film of the film or the films is an amorphous silicon oxide film.
5. A thermal treatment apparatus comprising:
a furnace for heat-treating a substrate; and
a substrate support for supporting the substrate in the furnace,
wherein the substrate support has a supporting portion which is in contact with the substrate and a main body portion which supports the supporting portion,
the main body portion is formed from a silicon carbide,
the supporting portion is formed from a silicon plate-like member and a thickness of the supporting portion is not less than 3 mm and not more than 10 mm,
a diameter of the supporting portion is smaller than a diameter of the substrate, and
a substrate-placing face of the supporting portion, on which the substrate is placed, is coated with an amorphous silicon oxide film.
6. A thermal treatment apparatus comprising:
a furnace for heat-treating a substrate; and
a substrate support for supporting the substrate in the furnace,
wherein the substrate support has a supporting portion that is in contact with the substrate and a plate that supports the supporting portion and a main body portion which supports the plate,
the supporting portion is formed from a silicon plate-like member and a thickness of the supporting portion is not less than 3 mm and not more than 10 mm,
a diameter of the supporting portion is smaller than a diameter of the substrate and a diameter of the plate, and
a substrate-placing face of the supporting portion, on which the substrate is placed, is coated with an amorphous silicon oxide film.
7. The thermal treatment apparatus according to claim 6 , wherein the plate and the main body portion are formed from a silicon carbide.