IP Library › Granted Patent US 6,767,752
Granted Patent Utility
US 6,767,752 · Confirmation No. 1119

TEMPERATURE CONTROL METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

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2004-12-16 C.AD Change of Address 1 View
2004-06-16 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-17 NOA Notice of Allowance and Fees Due (PTOL-85) 6 View
2004-03-17 892 List of references cited by examiner 1 View
2004-03-17 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-03-17 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-17 FWCLM Index of Claims 1 View
2004-03-01 SRNT Examiner's search strategy and results 1 View
2004-02-25 WFEE Fee Worksheet (SB06) 1 View
2004-02-25 FWCLM Index of Claims 1 View
2004-02-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-02-17 CLM Claims 4 View
2004-02-17 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2004-02-17 XT/ Extension of Time 1 View
2003-10-16 CTNF Non-Final Rejection 5 View
2003-10-16 1449 List of References cited by applicant and considered by examiner 1 View
2003-10-16 892 List of references cited by examiner 1 View
2003-10-16 FWCLM Index of Claims 1 View
2003-09-29 SRNT Examiner's search strategy and results 1 View
2002-10-21 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2002-10-21 OATH Oath or Declaration filed 3 View
2002-10-21 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-10-21 FOR Foreign Reference 8 View
2002-10-21 FRPR Certified Copy of Foreign Priority Application 21 View
2002-10-21 FRPR Certified Copy of Foreign Priority Application 19 View
2002-09-10 PEFN Pre-Exam Formalities Notice 2 View
2002-08-06 TRNA Transmittal of New Application 4 View
2002-08-06 SPEC Specification 18 View
2002-08-06 CLM Claims 2 View
2002-08-06 ABST Abstract 1 View
2002-08-06 DRW Drawings-only black and white line drawings 2 View
2002-08-06 OATH Oath or Declaration filed 3 View
2002-08-06 TRNA Transmittal of New Application 4 View
2002-08-06 SPEC Specification 18 View
2002-08-06 CLM Claims 2 View
2002-08-06 ABST Abstract 1 View
2002-08-06 OATH Oath or Declaration filed 3 View
2002-08-06 DRW Drawings-only black and white line drawings 2 View
2002-08-06 WFEE Fee Worksheet (SB06) 1 View
2002-08-06 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,767,752
App. No.
10/212,146
Filed
2002-08-06
Granted
2004-07-27
Pub. No.
US20030040198A1
Art Unit
2812
PTA
-32 days