Patent Assignment
Reel/Frame 013408/0891
Assignment of Assignor's Interest
Recorded: 2002-10-21
Pages: 3
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO, JAPAN
Covered Property
(1)
Temperature Control Method and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.