Patent Assignment
Reel/Frame 012578/0698
Assignment of Assignor's Interest
Recorded: 2002-02-01
Pages: 2
Assignors
KASANAMI, KATSUHISA
Executed: 2001-12-07
NISHITANI, EISUKE
Executed: 2001-12-12
NISHIWAKI, MICHIKO
Executed: 2001-12-22
OKADA, SATOSHI
Executed: 2001-12-26
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO 164-8511, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.