IP Library › Granted Patent US 6,541,344
Granted Patent Utility
US 6,541,344 · Confirmation No. 7026

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

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2013-09-24 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-09-24 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-09-18 PA.. Power of Attorney 1 View
2013-09-18 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2013-09-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-10-16 TRNA Transmittal of New Application 2 View
2001-10-16 SPEC Specification 12 View
2001-10-16 CLM Claims 2 View
2001-10-16 ABST Abstract 1 View
2001-10-16 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
Patent No.
US 6,541,344
App. No.
09/981,629
Filed
2001-10-16
Granted
2003-04-01
Pub. No.
US20020072165A1
Examiner
DANG, PHUC T
Art Unit
2818
PTA
-8 days