IP Library › Granted Patent US 6,746,908
Granted Patent Utility
US 6,746,908 · Confirmation No. 2372

TEMPERATURE CONTROLLING METHOD, THERMAL TREATING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

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2004-01-05 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-24 WFEE Fee Worksheet (SB06) 1 View
2003-10-24 FWCLM Index of Claims 1 View
2003-09-23 FWCLM Index of Claims 1 View
2003-09-23 WFEE Fee Worksheet (SB06) 2 View
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2003-09-08 CLM Claims 6 View
2003-09-08 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-09-08 TRNA Transmittal of New Application 1 View
2003-09-08 XT/ Extension of Time 1 View
2003-04-07 CTNF Non-Final Rejection 8 View
2003-04-07 892 List of references cited by examiner 1 View
2003-03-30 SRNT Examiner's search strategy and results 1 View
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2002-04-04 LET. Miscellaneous Incoming Letter 2 View
2002-02-13 LET. Miscellaneous Incoming Letter 4 View
2001-12-21 OATH Oath or Declaration filed 4 View
2001-12-21 LET. Miscellaneous Incoming Letter 3 View
2001-10-26 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-09-28 TRNA Transmittal of New Application 4 View
2001-09-28 SPEC Specification 46 View
2001-09-28 CLM Claims 4 View
2001-09-28 ABST Abstract 1 View
2001-09-28 DRW Drawings-only black and white line drawings 6 View
2001-09-28 OATH Oath or Declaration filed 4 View
2001-09-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-09-28 SRFW Search information including classification, databases and other search related notes 1 View
2001-09-28 FWCLM Index of Claims 1 View
2001-09-28 TRNA Transmittal of New Application 4 View
2001-09-28 DRW Drawings-only black and white line drawings 6 View
2001-09-28 SPEC Specification 46 View
2001-09-28 CLM Claims 4 View
2001-09-28 ABST Abstract 1 View
2001-09-28 OATH Oath or Declaration filed 4 View
2001-09-28 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,746,908
App. No.
09/964,863
Filed
2001-09-28
Granted
2004-06-08
Pub. No.
US20020055080A1
Art Unit
2814
PTA
-63 days