Patent Assignment
Reel/Frame 012395/0931
Assignment of Assignor's Interest
Recorded: 2001-12-21
Pages: 3
Assignors
TANAKA, KAZUO
Executed: 2001-10-26
UENO, MASAAKI
Executed: 2001-10-26
NAKANO, MINORU
Executed: 2001-10-26
YAMAGUCHI, HIDETO
Executed: 2001-10-26
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-20, 3-CHOME, HIGASHI-NAKANO NAKAMO-KU, TOKYO, JAPAN
Covered Property
(1)
Temperature Controlling Method, Thermal Treating Apparatus, and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.