Reaction tube, substrate processing apparatus and method of manufacturing semiconductor device
View Patent ↗Provided are a reaction tube, a substrate processing apparatus, and a method of manufacturing a semiconductor device capable of suppressing a non-uniform distribution of a gas in a top region to improve the flow of the gas and film uniformity within and between substrate surfaces. The reaction tube has a cylindrical shape, accommodates a plurality of substrates stacked therein, and includes a cylindrical portion and a ceiling portion covering an upper end portion of the cylindrical portion, the ceiling portion having a substantially flat top inner surface. A thickness of a sidewall of the ceiling portion is greater than that of a sidewall of the cylindrical portion.
1. A reaction tube to accommodate a plurality of substrates stacked therein, the reaction tube comprising:
a hollow cylindrical portion; and
a ceiling portion covering an upper end portion of the cylindrical portion to form a cylindrical process chamber, the ceiling portion having a substantially flat top inner surface that terminates the cylindrical process chamber and an external diameter that is greater than an outer diameter of the cylindrical portion, wherein a thickness of a sidewall of the ceiling portion is greater than that of a sidewall of the cylindrical portion and wherein the process chamber is terminated by the flat top inner surface of the ceiling portion where the outer diameter of the ceiling portion is greater than the outer diameter of the cylindrical portion.
2. The reaction tube according to claim 1 , wherein a curvature of an outer connecting surface between the cylindrical portion and the ceiling portion is non-zero.
3. The reaction tube according to claim 1 , further comprising:
a buffer chamber partitioned from the process chamber to accommodate an electrode therein.
4. The reaction tube according to claim 1 , wherein the inner diameter of the process chamber is substantially constant in both the ceiling portion and the cylindrical portion.
5. The reaction tube according to claim 1 , wherein a top outer surface of the ceiling portion is substantially flat.
6. The reaction tube according to claim 1 , wherein the ceiling portion is mushroom-shaped.
7. A substrate processing apparatus comprising:
a reaction tube to accommodate a plurality of substrates stacked therein, the reaction tube comprising:
a hollow cylindrical portion; and
a ceiling portion covering an upper portion of the cylindrical portion to form a cylindrical process chamber in the reaction tube, the ceiling portion having a substantially flat top inner surface that terminates the cylindrical process chamber and an external diameter that is greater than an outer diameter of the cylindrical portion, a thickness of a sidewall of the ceiling portion being greater than that of a sidewall of the cylindrical portion, wherein the process chamber is terminated by the flat top inner surface of the ceiling portion where the outer diameter of the ceiling portion is greater than the outer diameter of the cylindrical portion;
a process gas supply system including a nozzle disposed in the process chamber along a stacking direction of the plurality of substrates, and configured to supply a process gas into the process chamber via the nozzle; and
a control unit configured to control the process gas supply system to supply the process gas into the process chamber so as to process the plurality of substrates.
8. The substrate processing apparatus according to claim 7 , wherein the reaction tube further comprises a buffer chamber partitioned from the process chamber to accommodate an electrode therein.
9. The substrate processing apparatus according to claim 7 , wherein the inner diameter of the process chamber is substantially constant in both the ceiling portion and the cylindrical portion.
10. The reaction tube according to claim 7 , wherein a curvature of a connecting surface between the cylindrical portion and the ceiling portion is non-zero.
11. The reaction tube according to claim 7 , wherein a top outer surface of the ceiling portion is substantially flat.
12. The reaction tube according to claim 7 , further comprising: a substrate retaining member accommodating the plurality of substrates in the reaction tube, wherein a distance between the top inner surface of the ceiling portion and a top surface of the substrate retaining member is equal to or smaller than two times a distance between adjacent substrates among the plurality of substrates.
13. A substrate processing apparatus comprising:
a reaction tube having a cylindrical shape and accommodating a plurality of substrates stacked therein, the reaction tube comprising:
a cylindrical portion; and
a ceiling portion covering an upper portion of the cylindrical portion wherein an outer diameter of the ceiling portion is greater than an outer diameter of the cylindrical portion and an outer connecting surface between the cylindrical portion and the ceiling portion is of non-zero curvature;
a process chamber defined in the reaction tube and configured to process the plurality of substrates therein; and
a process gas supply system configured to supply a process gas into the process chamber.