Patent Assignment
Reel/Frame 031197/0692
Assignment of Assignor's Interest
Recorded: 2013-09-12
Pages: 4
Assignors
OKADA, SATOSHI
Executed: 2013-08-21
TAKAGI, KOSUKE
Executed: 2013-08-21
KAGA, YUKINAO
Executed: 2013-08-21
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Reaction Tube, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.