IP Library › Granted Patent US 8,423,169
Granted Patent B2
US 8,423,169 · App. 12/805,199 · Granted Apr 16, 2013

Substrate processing system and group management system

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Quick Facts
Patent No.
US 8,423,169
App. No.
12/805,199
Granted
Apr 16, 2013
Kind
B2
Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 31, 2018
From: HITACHI KOKUSAI ELECTRIC INC.
To: KOKUSAI ELECTRIC CORPORATION
Reel/Frame 048008/0206 →