Patent Assignment
Reel/Frame 012674/0755
Assignment of Assignor's Interest
Recorded: 2002-03-14
Pages: 2
Assignors
KOGANO, MINORU
Executed: 2002-02-05
INOKUCHI, YASUHIRO
Executed: 2002-02-05
SAMBU, MAKOTO
Executed: 2002-02-05
MORIYA, ATSUSHI
Executed: 2002-02-05
KUNII, YASUO
Executed: 2002-02-05
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO 164-8511, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.