IP Library › Granted Patent US 6,503,079
Granted Patent Utility
US 6,503,079 · Confirmation No. 5251

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

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 Code Description Pages PDF
2002-01-10 TRNA Transmittal of New Application 1 View
2002-01-10 ADS Application Data Sheet 1 View
2002-01-10 SPEC Specification 29 View
2002-01-10 CLM Claims 4 View
2002-01-10 ABST Abstract 1 View
2002-01-10 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
Patent No.
US 6,503,079
App. No.
10/041,617
Filed
2002-01-10
Granted
2003-01-07
Pub. No.
US20020094502A1
Art Unit
3749
PTA
-113 days