Semiconductor device manufacturing and processing methods and apparatuses for forming a film

1. A method of manufacturing a semiconductor device comprising:

accommodating a substrate in a processing chamber; and

forming a film including silicon and carbon on the substrate by supplying a silicon-based gas and an amine-based gas into the processing chamber that is heated, wherein

the forming of the film including silicon and carbon includes:

supplying the silicon-based gas and the amine-based gas into the processing chamber and exhausting the silicon-based gas and the amine-based gas from the processing chamber, while a state in which an exhaust rate of the silicon-based gas and the amine-based gas from the processing chamber is lower than a supply rate of the silicon-based gas and the amine-based gas into the processing chamber is maintained; and

stopping supplying the silicon-based gas and the amine-based gas into the processing chamber, and exhausting an inside of the processing chamber.

2. The method according to claim 1 , wherein, in the forming of the film including silicon and carbon, an atomic concentration of carbon in the film including silicon and carbon is controlled according to a time when the state in which the exhaust rate of the silicon-based gas and the amine-based gas from the processing chamber is lower than the supply rate of the silicon-based gas and the amine-based gas into the processing chamber is maintained.

3. The method according to claim 1 , wherein in the forming of the film including silicon and carbon, the inside of the processing chamber is heated to reach a temperature at which at least one of the silicon-based gas and the amine-based gas is thermally decomposed.

4. The method according to claim 1 , wherein the forming of the film including silicon and carbon is performed under an atmosphere without using plasma.

5. The method according to claim 1 , wherein, in the forming of the film including silicon and carbon, alternately performing, predetermined times,

maintaining the state in which the exhaust rate of the silicon-based gas and the amine-based gas from the processing chamber is lower than the supply rate of the silicon-based gas and the amine-based gas into the processing chamber, and

stopping supplying the silicon-based gas and the amine-based gas into the processing chamber, and exhausting of the inside of the processing chamber.

6. The method according to claim 1 , wherein, in the forming of the film including silicon and carbon, the following are set as one cycle,

maintaining the state in which the exhaust rate of the silicon-based gas and the amine-based gas from the processing chamber is lower than the supply rate of the silicon-based gas and the amine-based gas into the processing chamber; and

stopping supplying the silicon-based gas and the amine-based gas into the processing chamber, and exhausting of the inside of the processing chamber;

and the cycle is repeated plural times.

7. The method according to claim 1 , wherein, in the forming of the film including silicon and carbon, the silicon-based gas and the amine-based gas that are supplied into the processing chamber are thermally decomposed, substances generated by the thermal decomposition of the silicon-based gas and the amine-based gas are caused to react with each other, and the film including silicon and carbon is formed by the reaction in a period when the state in which the exhaust rate of the silicon-based gas and the amine-based gas from the processing chamber is lower than the supply rate of the silicon-based gas and the amine-based gas into the processing chamber is maintained.

8. The method according to claim 1 , wherein the silicon-based gas is at least one type of gas selected from the group consisting of Si2H6 and Si3H8, and the amine-based gas is at least one type of gas selected from the group consisting of (C2H5)xNH3-x, (C3H7)xNH3-x, (C4H9)xNH3-x, ((CH3)2CH)xNH3-x and ((CH3)2CHCH2)xNH3-x (here, x is an integer of 1 to 3).

9. The method according to claim 1 , wherein, in the forming of the film including silicon and carbon, a temperature of the substrate is maintained from 350° C. to 450° C.

10. The method according to claim 1 , wherein, the film including silicon and carbon includes a silicon carbide film.

11. The method according to claim 1 , wherein, the film including silicon and carbon includes at least one type of film selected from the group consisting of a silicon carbide film and a silicon carbonitride film.

12. The method according to claim 1 , wherein, the forming of the film including silicon and carbon further includes supplying a nitrogen-containing gas and/or supplying an oxygen-containing gas, and at least one type of film selected from the group consisting of a silicon carbonitride film, a silicon oxycarbide film, and a silicon oxycarbonitride film is formed as the film including silicon and carbon.

13. A method of manufacturing a semiconductor device comprising:

accommodating a substrate in a processing chamber; and

forming a film including silicon, carbon, and nitrogen on the substrate by supplying a silicon-based gas, an amine-based gas and a nitrogen-containing gas into the processing chamber that is heated, wherein

the forming of the film including silicon and carbon includes:

supplying the silicon-based gas, the amine-based gas and the nitrogen-containing gas into the processing chamber and exhausting the silicon-based gas, the amine-based gas and the nitrogen-containing gas from the processing chamber, while a state in which an exhaust rate of the silicon-based gas, the amine-based gas and the nitrogen-containing gas from the processing chamber is lower than a supply rate of the silicon-based gas, the amine-based gas and the nitrogen-containing gas into the processing chamber is maintained; and

stopping supplying the silicon-based gas, the amine-based gas and the nitrogen-containing gas into the processing chamber, and exhausting an inside of the processing chamber.

14. A non-transitory computer-readable medium storing a program that causes a computer to perform a process comprising:

accommodating a substrate in a processing chamber; and

forming a film including silicon and carbon on the substrate by supplying a silicon-based gas and an amine-based gas into the processing chamber that is heated, wherein in the forming of the film including silicon and carbon, the following are executed:

supplying the silicon-based gas and the amine-based gas into the processing chamber, and exhausting the silicon-based gas and the amine-based gas from the processing chamber, while a state in which an exhaust rate of the silicon-based gas and the amine-based gas from the processing chamber is lower than a supply rate of the silicon-based gas and the amine-based gas into the processing chamber is maintained; and

stopping supplying the silicon-based gas and the amine-based gas into the processing chamber, and exhausting an inside of the processing chamber.