Granted Patent
Utility
US 6,638,860
· Confirmation No. 9457
METHOD AND APPARATUS FOR PROCESSING SUBSTRATES AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-03 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-09-27 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-09-27 | SPEC |
Specification | 30 | View | |
| 2001-09-27 | CLM |
Claims | 5 | View | |
| 2001-09-27 | ABST |
Abstract | 1 | View | |
| 2001-09-27 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2001-09-27 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Tatsuhisa Matsunaga
Tokyo, JAPAN
Masahiro Teramoto
Tokyo, JAPAN
Norio Akutsu
Tokyo, JAPAN
Kouichi Noto
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/684
H10P72/3312
C23C16/54
H10P72/7602
H10P14/43
H10P72/3412
Prosecution
- Examiner
- LINDSAY JR, WALTER LEE
- Art Unit
- 2812
- Customer No.
- 23364
- Docket No.
- MATS3003/EM/7256
- Confirmation No.
- 9457
Foreign Priority
2000-294176
·
2000-09-27
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JAPAN
2000-330968
·
2000-10-30
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JAPAN
2001-134821
·
2001-05-02
·
JAPAN
Publication
- Pub. No.
- US20020037645A1
- Pub. Date
- 2002-03-28
Patent Term Adjustment
-60days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-31
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S NAME, PREVIOUSLY RECORDED AT REEL 0112207 FRAME 0784.
Recorded 2001-12-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-12-05
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Quick Facts
- Patent No.
- US 6,638,860
- App. No.
- 09/963,382
- Filed
- 2001-09-27
- Granted
- 2003-10-28
- Pub. No.
- US20020037645A1
- Examiner
- LINDSAY JR, WALTER LEE
- Art Unit
- 2812
- PTA
- -60 days
External Links