Substrate processing apparatus and manufacturing method of semiconductor device using plasma generation
View Patent ↗A manufacturing method for a semiconductor device, that loads a substrate on which a film containing oxygen atoms, chlorine atoms, and metal atoms is formed into a processing chamber so as to be supported by a substrate support part. The substrate is heated by the substrate support part. The inside of the processing chamber is exhausted by a gas exhaust part while supplying nitrogen atoms-containing gas and hydorgen atoms-containing gas into the processing chamber by a gas supply part. A plasma generation part is then used to excite the nitrogen atoms-containing gas and the hydrogen atoms-containing gas supplied into the processing chamber.
1. A manufacturing method of a semiconductor device, comprising the steps of:
loading a substrate on which a film containing oxygen atoms, chlorine atoms, and metal atoms is formed into a processing chamber so as to be supported by a substrate support part;
heating the substrate by the substrate support part;
exhausting inside of the processing chamber by a gas exhaust part while supplying nitrogen atoms-containing gas and hydrogen atoms-containing gas into the processing chamber by a gas supply part; and
exciting the nitrogen atoms-containing gas and the hydrogen atoms-containing gas supplied into the processing chamber by a plasma generation part.
2. The manufacturing method according to claim 1 , wherein the metal atoms are titanium.
3. The manufacturing method according to claim 2 , wherein the film is a nitride film.
4. The manufacturing method according to claim 2 , wherein a natural oxide film is formed on the film.
5. The manufacturing method according to claim 2 , wherein the film is a lower electrode of a capacitor.
6. The manufacturing method according to claim 1 , wherein the plasma generation part is provided so as to generate plasma in the processing chamber.
7. The manufacturing method according to claim 1 , wherein
the nitrogen atoms-containing gas is any one of nitrogen gas, ammonia gas, and monomethyl hydrazine gas; and
hydrogen atoms-containing gas is any one of hydrogen gas, ammonia gas, and monomethyl hydrazine gas.
8. The manufacturing method according to claim 1 , wherein the film is a nitride film.
9. The manufacturing method according to claim 8 , wherein a natural oxide film is formed on the film.
10. The manufacturing method according to claim 8 , wherein the nitride film is a lower electrode of a capacitor, and a natural oxide film is formed on the nitride film.
11. The manufacturing method according to claim 1 , wherein a natural oxide film is formed on the film.
12. The manufacturing method according to claim 1 , wherein the film is a lower electrode of a capacitor.
13. The manufacturing method according to claim 12 , wherein a natural oxide film is formed on the film.
14. The manufacturing method according to claim 1 , wherein in heating the substrate, the substrate is heated to a temperature of 200° C. or more and under 750° C.
15. The manufacturing method according to claim 1 , wherein in heating the substrate, the substrate is heated to a temperature of 200° C. or more and 700° C. or less.