Patent Assignment
Reel/Frame 024778/0007
Assignment of Assignor's Interest
Recorded: 2010-08-02
Pages: 4
Assignors
HORIE, TADASHI
Executed: 2010-06-15
HIRANO, AKITO
Executed: 2010-06-21
TERASAKI, TADASHI
Executed: 2010-06-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Manufacturing Method of Semiconductor Device Using Plasma Generation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.