Granted Patent
Utility
US 6,548,404
· Confirmation No. 3399
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-29 | TRNA |
Transmittal of New Application | 4 | View | |
| 2001-03-29 | SPEC |
Specification | 15 | View | |
| 2001-03-29 | CLM |
Claims | 3 | View | |
| 2001-03-29 | ABST |
Abstract | 1 | View | |
| 2001-03-29 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-03-29 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Hideharu Itatani
Tokyo, JAPAN
Masayuki Tsuneda
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/686
H10D1/696
H10P14/20
H10P14/43
C23C16/18
C23C16/40
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Customer No.
- 21254
- Docket No.
- KOKUSAI 063
- Confirmation No.
- 3399
Foreign Priority
2000-99754
·
2000-03-31
·
JAPAN
2001-24360
·
2001-01-31
·
JAPAN
Publication
- Pub. No.
- US20010026963A1
- Pub. Date
- 2001-10-04
Patent Term Adjustment
-22days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-29
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Quick Facts
- Patent No.
- US 6,548,404
- App. No.
- 09/819,653
- Filed
- 2001-03-29
- Granted
- 2003-04-15
- Pub. No.
- US20010026963A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- -22 days
External Links