Granted Patent
Utility
US 6,495,473
· Confirmation No. 4270
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-18 | TRNA |
Transmittal of New Application | 4 | View | |
| 2002-03-18 | SPEC |
Specification | 11 | View | |
| 2002-03-18 | CLM |
Claims | 2 | View | |
| 2002-03-18 | ABST |
Abstract | 1 | View | |
| 2002-03-18 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-03-18 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Tomoshi Taniyama
Tokyo, JAPAN
Kouji Tometsuka
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/758
C23C16/45591
C23C16/4401
C23C16/455
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Customer No.
- 21254
- Docket No.
- KOKUSAI089
- Confirmation No.
- 4270
Foreign Priority
2001-143880
·
2001-05-14
·
JAPAN
Publication
- Pub. No.
- US20020168877A1
- Pub. Date
- 2002-11-14
Patent Term Adjustment
-64days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-18
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Quick Facts
- Patent No.
- US 6,495,473
- App. No.
- 10/098,472
- Filed
- 2002-03-18
- Granted
- 2002-12-17
- Pub. No.
- US20020168877A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- -64 days
External Links