Patent Assignment
Reel/Frame 012709/0895
Assignment of Assignor's Interest
Recorded: 2002-03-18
Pages: 3
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, 3-CHOME, HIGASHI-NAKANO NAKANO-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.