IP Library › Granted Patent US 6,825,126
Granted Patent Utility
US 6,825,126 · Confirmation No. 7809

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS

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Quick Facts
Patent No.
US 6,825,126
App. No.
10/422,859
Filed
2003-04-25
Granted
2004-11-30
Pub. No.
US20040043544A1
Examiner
NHU, DAVID
Art Unit
2818
PTA
-54 days