Patent Assignment
Reel/Frame 013911/0377
Assignment of Assignor's Interest
Recorded: 2003-08-25
Pages: 2
Assignors
ASAI, MASAYUKI
Executed: 2003-05-14
HORII, SADAYOSHI
Executed: 2003-05-14
KITAYAMA, KANAKO
Executed: 2003-05-14
TSUNEDA, MASAYUKI
Executed: 2003-05-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO, 164-8511, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.