Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member
View Patent ↗A heating apparatus comprises heating elements arranged of a sheet form and having notches or through holes provided therein, a side wall member made of an electrically conductive material and arranged to surround and define the heating space, and holding members disposed at the heating space side of the side wall member for holding at one end the heating elements. Also, extending members are provided, each member comprising an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element and projected portions arranged to project at both, front and back, sides of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements along the extending direction.
1. A heating apparatus comprising:
heating elements arranged of a sheet form and having notches or through holes provided therein;
a side wall member made of an electrically conductive material and arranged to surround and define the heating space;
holding members disposed at the heating space side of the side wall member for holding at one end the heating elements; and
extending members, each member comprising an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element and projected portions arranged to project at both, front and back, sides of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements along the extending direction.
2. A heating apparatus comprising:
heating elements arranged of a sheet form and having notches or through holes provided therein;
a side wall member made of an electrically conductive material and arranged to surround and define the heating space;
holding members disposed at the heating space side of the side wall member for holding at one end the heating elements; and
extending members, each member comprising an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element and a projected portion arranged to project at the side wall member side of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements towards the side wall member.
3. A heating apparatus according to claim 1 or 2 , wherein
the projected portion is arranged of a flange form.
4. A heating apparatus according to claim 1 or 2 , wherein
two or more of the extending members are provided to extend through at least one of the notches or through holes provided in each heating element, at least one of the extending members located to extend through the notch or through hole provided at the lower end of the heating element.
5. A heating apparatus according to claim 1 , wherein
the projected portion is arranged to span from the back side of the heating element to the side wall member.
6. A heating apparatus according to claim 2 , wherein
the projected portion is arranged to span from the side wall member side of the heating element to the side wall member.
7. A heating apparatus according to claim 5 , wherein
the projected portion is provided separately of the extending-through portion.
8. A heating apparatus according to claim 6 , wherein
the projected portion is provided separately of the extending-through portion.
9. A heating apparatus according to claim 5 or 6 , wherein
the extending-through portion has a recess provided therein where the projected portion is located.
10. A heating apparatus according to claim 5 or 6 , wherein
the projected portion is arranged of an elliptical shape where the minor axis is shorter than the width of the notch or through hole in the heating element while the major axis is longer than the width of the notch or through hole in the heating element.
11. A heating apparatus according to claim 1 or 2 , wherein
the extending-through portion has a through hole provided therein into which the projected portion arranged of a wedge form is inserted.
12. A heating apparatus according to claim 2 , wherein
the heating elements are held to tilt from the vertical direction so that one end thereof comes closer to the heating space than the other end.
13. A heating apparatus comprising:
heating elements arranged of a zigzag form where the upper turned portions are squared and the lower turned portions are arched; and
insulators for holding the upper portions of the heating element, wherein
the insulator is arranged to have projections thereof formed to come into direct contact with both ends of two adjacent upper turned portions of the heating element.
14. A substrate processing apparatus comprising:
a reactor container disposed in the heating space in the heating apparatus defined in claim 1 or 2 for processing a substrate.
15. A substrate processing apparatus according to claim 13 , further comprising:
a reactor container disposed in the heating space in the heating apparatus for processing a substrate.
16. A method of manufacturing semiconductor devices comprising:
loading a substrate into a reactor container; and
heating up the reactor container installed in a heating apparatus which comprises heating elements arranged of a sheet form and having notches or through holes provided therein; a side wall member made of an electrically conductive material and arranged to surround and define the heating space; holding members disposed at the heating space side of the side wall member for holding at one end the heating elements; and extending-though members, each member comprising an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element and projected portions arranged to project at both, front and back, sides of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements along the extending direction; and processing a substrate.
17. A method of manufacturing semiconductor devices comprising:
loading a substrate into a reactor container; and
heating up the reactor container installed in a heating apparatus which comprises heating elements arranged of a sheet form and having notches or through holes provided therein; a side wall member made of an electrically conductive material and arranged to surround and define the heating space; holding members disposed at the heating space side of the side wall member for holding at one end the heating elements; and extending members, each member comprising an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element and a projected portion arranged to project at the side wall member side of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements towards the side wall member; and processing a substrate.
18. An extending member for use in a heating apparatus which at least includes heating elements arranged of a sheet form and having notches or through holes provided therein, a side wall member made of an electrically conductive material and arranged to surround and define the heating space, and holding members disposed at the heating space side of the side wall member for holding at one end the heating elements, comprising:
an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element; and
projected portions arranged to project at both, front and back, sides of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements along the extending direction.
19. An extending member for use in a heating apparatus which at least includes heating elements arranged of a sheet form and having notches or through holes provided therein, a side wall member made of an electrically conductive material and arranged to surround and define the heating space, and holding members disposed at the heating space side of the side wall member for holding at one end the heating elements, comprising:
an extending-through portion arranged to project from the heating space side of the side wall member and extend through the notch or through hole between both ends in the heating element; and
a projected portion arranged to project at the side wall member side of the heating element from the extending-through portion in a direction, which is orthogonal to the extending direction of the extending-through portion, thus to inhibit the displacement of the heating elements towards the side wall member.