IP Library › Granted Patent US 6,555,421
Granted Patent Utility
US 6,555,421 · Confirmation No. 7845

METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

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 Code Description Pages PDF
2001-01-12 TRNA Transmittal of New Application 4 View
2001-01-12 A.PE Preliminary Amendment 2 View
2001-01-12 SPEC Specification 30 View
2001-01-12 CLM Claims 5 View
2001-01-12 ABST Abstract 1 View
2001-01-12 DRW Drawings-only black and white line drawings 9 View
2001-01-12 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,555,421
App. No.
09/758,238
Filed
2001-01-12
Granted
2003-04-29
Pub. No.
US20010008782A1
Examiner
LUU, PHO M
Art Unit
2824
PTA
0 days