Granted Patent
Utility
US 6,540,465
· Confirmation No. 7297
SUBSTRATE PROCESSING APPARATUS
Inventor:
Kouji Tometsuka
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-09-30 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2013-09-30 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2013-09-18 | PA.. |
Power of Attorney | 1 | View | |
| 2013-09-18 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2013-09-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-03-16 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2011-05-03 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2011-03-03 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2011-03-01 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-03-29 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-29 | SPEC |
Specification | 30 | View | |
| 2001-03-29 | CLM |
Claims | 2 | View | |
| 2001-03-29 | ABST |
Abstract | 1 | View | |
| 2001-03-29 | DRW |
Drawings-only black and white line drawings | 9 | View |
Inventors
Kouji Tometsuka
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
414/160
H10P72/3312
H10P72/3406
H10P72/3412
C23C16/54
Prosecution
- Examiner
- FOX, CHARLES A
- Art Unit
- 3652
- Customer No.
- 73230
- Confirmation No.
- 7297
Foreign Priority
2000-95055
·
2000-03-30
·
JAPAN
Publication
- Pub. No.
- US20010052325A1
- Pub. Date
- 2001-12-20
Patent Term Adjustment
-98days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-31
from
TOMETSUKA, KOUJI
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-07-12
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Quick Facts
- Patent No.
- US 6,540,465
- App. No.
- 09/823,280
- Filed
- 2001-03-29
- Granted
- 2003-04-01
- Pub. No.
- US20010052325A1
- Examiner
- FOX, CHARLES A
- Art Unit
- 3652
- PTA
- -98 days
External Links