Granted Patent
Utility
US 6,482,753
· Confirmation No. 5810
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Inventor:
Kouji Tometsuka
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-03-12 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-03-12 | ADS |
Application Data Sheet | 1 | View | |
| 2002-03-12 | SPEC |
Specification | 23 | View | |
| 2002-03-12 | CLM |
Claims | 3 | View | |
| 2002-03-12 | ABST |
Abstract | 1 | View | |
| 2002-03-12 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-03-12 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Kouji Tometsuka
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/758
H10P95/00
C23C16/45519
C23C16/4409
C23C16/4411
C23C16/4412
C23C16/45591
Prosecution
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- Customer No.
- 25944
- Docket No.
- 112201
- Confirmation No.
- 5810
Foreign Priority
2001-139542
·
2001-05-10
·
JAPAN
Publication
- Pub. No.
- US20020168854A1
- Pub. Date
- 2002-11-14
Patent Term Adjustment
-85days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-31
from
TOMETSUKA, KOUJI
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-03-12
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Quick Facts
- Patent No.
- US 6,482,753
- App. No.
- 10/095,072
- Filed
- 2002-03-12
- Granted
- 2002-11-19
- Pub. No.
- US20020168854A1
- Examiner
- GHYKA, ALEXANDER G
- Art Unit
- 2812
- PTA
- -85 days
External Links