Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium
View Patent ↗An apparatus for manufacturing semiconductor devices is provided with a processing liquid supply part for supplying processing liquid into a processing chamber which houses a substrate, a heater part for heating the processing liquid in the processing chamber, and a substrate support part which is provided in the processing chamber and supports the substrate.
1. A substrate processing apparatus, comprising:
a pressure-controllable process container configured to accommodate a substrate;
a substrate support disposed in the process container and supporting the substrate;
a process liquid supply unit configured to supply a process liquid into the process container;
an evaporator disposed in the process container and configured to receive the process liquid from the process liquid supply unit, wherein a diameter of the evaporator is greater than a maximum outer diameter of the substrate; and
a heating unit configured to heat the evaporator to generate a process gas from evaporation of the process liquid within the process container.
2. The substrate processing apparatus of claim 1 , further comprising;
a control unit configured to control the heating unit to heat the evaporator such that the process liquid brought into contact with the evaporator is evaporated in the process container.
3. The substrate processing apparatus of claim 1 , wherein the process liquid comprises hydrogen peroxide.
4. The substrate processing apparatus of claim 1 , wherein a silicon-containing film is formed on the substrate.
5. The substrate processing apparatus of claim 1 , wherein the evaporator is disposed on top of the substrate support.
6. The substrate processing apparatus of claim 2 , wherein the process liquid comprises at least two materials having different boiling points, and
the control unit is configured to control the heating unit in a manner that a concentration of the process liquid before the process liquid is supplied to the process container is equal to that of the process liquid after the process liquid is evaporated.
7. The substrate processing apparatus of claim 1 , wherein the process liquid supply unit comprises a plurality of supply holes disposed over the evaporator, the plurality of supply holes being configured to supply the process liquid toward the evaporator.
8. The substrate processing apparatus of claim 7 , wherein the heating unit is disposed over the evaporator and the plurality of the supply holes.
9. The substrate processing apparatus of claim 5 , wherein the substrate support includes a plurality of props configured to support a plurality of substrates in multiple stages.
10. A method of manufacturing a semiconductor device, comprising:
loading a substrate on a substrate support disposed in a pressure-controllable process container;
supplying a process liquid to an evaporator disposed in the process container, wherein a diameter of the evaporator is greater than a maximum outer diameter of the substrate; and
heating the evaporator to evaporate the process liquid supplied to the evaporator in the process container to generate a process gas within the process container.
11. The method of claim 10 , wherein the process liquid comprises hydrogen peroxide.
12. The method of claim 10 , wherein a silicon-containing film is formed on the substrate.
13. The method of claim 12 , wherein the silicon-containing film comprises polysilazane.
14. A non-transitory computer-readable recording medium storing a program that causes a computer to perform:
a loading sequence of loading a substrate on a substrate support disposed in a pressure-controllable process container;
a process liquid supplying sequence of supplying a process liquid to an evaporator disposed in the process container, wherein a diameter of the evaporator is greater than a maximum outer diameter of the substrate; and
a process liquid heating sequence of heating the evaporator to evaporate the process liquid supplied to the evaporator in the process container to generate a process gas within the process container.