Substrate processing apparatus
View Patent ↗A substrate processing apparatus cleaning method that includes: containing a cleaning gas in a reaction tube without generating a gas flow of the cleaning gas in the reaction tube by supplying the cleaning gas into the reaction tube and by completely stopping exhaustion of the cleaning gas from the reaction tube or by exhausting the cleaning gas at an exhausting rate which substantially does not affect uniform diffusion of the cleaning gas in the reaction tube from at a point of time of a period from a predetermined point of time before the cleaning gas is supplied into the reaction tube to a point of time when several seconds are elapsed after starting of supply of the cleaning gas into the reaction tube; and thereafter exhausting the cleaning gas from the reaction tube.
1. A substrate processing apparatus, comprising:
a reaction tube capable of accommodating a plurality of substrates;
a gas nozzle that introduces a reaction gas supplied through a first flow-rate control valve and a cleaning gas supplied through a second flow-rate control valve into the reaction tube, the gas nozzle extending in a longitudinal direction of the reaction tube and having a large number of holes;
a gas exhausting tube that exhausts an atmosphere in the reaction tube, the gas exhausting tube being connected to a lower portion of the reaction tube and having a closing member;
a controller that controls the first and second flow-rate control valves and the closing member such that
in a state wherein the substrates are accommodated in the reaction tube, the reaction gas is supplied from the holes into the reaction tube to process the substrates,
thereafter in a state wherein the substrates are transferred out from the reaction tube, a first stage and a second stage are repeated at least two cycles to remove reaction by-product deposited in the reaction tube, the first stage being a stage wherein a cleaning gas is supplied until a pressure in the reaction tube becomes 10 Torr or more after the cleaning gas is started to be supplied into the reaction tube, with exhaustion from the reaction tube being completely stopped or the reaction tube being exhausted at an exhausting rate that does not affect a uniform diffusion of the cleaning gas in the reaction tube from a predetermined point of time before the cleaning gas is supplied into the reaction tube to a point of time before the cleaning gas is supplied into the reaction tube to a point of time when several seconds are elapsed after starting of the supply of the cleaning gas into the reaction tube, and the second stage being a stage wherein immediately after the first stage the supply of the cleaning gas is completely stopped, an inside of the reaction tube is exhausted to a base pressure.
2. A substrate processing apparatus as recited in claim 1 , further comprising a heater, wherein
the controller controls the heater such that the inside of the reaction tube is heated at 630° C. when the cleaning gas is supplied, and
the cleaning gas is NH 3 and the reaction by-product is Si 3 N 4 .