Heat treatment apparatus and method of manufacturing substrates
View Patent ↗A heat treatment apparatus wherein a nozzle is accurately provided on an adaptor to prevent the nozzle from interfering with other part items and a possibility of breakage due to heat expansion of the nozzle can be reduced. The heat treatment apparatus ( 10 ) is provided with a reaction tube ( 42 ) for treating a substrate ( 54 ), a quartz adaptor ( 44 ) for supporting the reaction tube ( 42 ), a nozzle ( 66 ) connected to the adaptor ( 44 ) for supplying a treatment gas into the reaction tube ( 42 ), and a heater ( 46 ) provided outside the reaction tube ( 42 ) for heating inside the reaction tube ( 42 ). The nozzle ( 66 ) is connected to an upper plane of the adaptor ( 44 ) in the reaction tube ( 42 ) at least a part which is of the nozzle ( 66 ) and is connected with the adaptor ( 44 ) is made of quartz and other nozzle parts are made of silicon carbide.
1. A heat treatment apparatus comprising:
a reaction tube for treating a substrate;
an adaptor for supporting the reaction tube, the entire adaptor located below a lower end of the reaction tube;
a nozzle for supplying treatment gas into the reaction tube; and
a heater for heating an interior of the reaction tube, the heater being arranged around the reaction tube except for the adaptor;
wherein the nozzle is disposed on an upper surface of the adaptor,
wherein the nozzle includes a first portion and a second portion, the first portion of the nozzle being connected to the adaptor via a nozzle mounting hole formed on the upper surface of the adaptor, the second portion located above the first portion and connected to the first portion, and
wherein the first portion is formed of a material having an equal coefficient of thermal expansion as a material forming the adaptor.
2. The heat treatment apparatus according to claim 1 , wherein the first portion of the nozzle is formed of a material having a lower coefficient of thermal expansion than a material forming the second portion of the nozzle.
3. The heat treatment apparatus according to claim 1 , wherein the first portion of the nozzle is formed of quartz, and the second portion of the nozzle is formed of silicon carbide.
4. The heat treatment apparatus according to claim 2 , wherein the first portion of the nozzle and the second portion of the nozzle are fitted and connected and a part of the first portion of the nozzle is fitted into the second portion of the nozzle.
5. A method of manufacturing a substrate comprising:
loading the substrate into a reactor having a reaction tube, an adaptor for supporting the reaction tube, the entire adaptor located below a lower end of the reaction tube, and a heater for heating an interior of the reaction tube, the heater being arranged around the reaction tube except for the adaptor;
treating the substrate by supplying treatment gas into the reactor by a nozzle disposed on an upper surface of the adaptor, the nozzle including a first portion and a second portion, the first portion of the nozzle being connected to the adaptor via a nozzle mounting hole formed on the upper surface of the adaptor, the second portion being located above the first portion and connected to the first portion, the first portion being formed of a material equivalent in coefficient of thermal expansion to a material forming the adaptor; and
unloading the substrate from the reactor after the treatment.
6. The heat treatment apparatus according to claim 1 , wherein a connected part of the first portion of the nozzle and the second portion of the nozzle is located below the lower end of the heater.
7. The method of manufacturing a substrate according to claim 5 , wherein a connected part of the first portion of the nozzle and the second portion of the nozzle is located below the lower end of the heater.
8. A heat treatment apparatus comprising:
a reaction tube for treating a substrate;
an adaptor for supporting the reaction tube, the entire adaptor located below a lower end of the reaction tube;
a nozzle for supplying treatment gas into the reaction tube; and
a heater for heating an interior of the reaction tube, the heater being arranged around the reaction tube except for the adaptor;
wherein the nozzle is disposed on an upper surface of the adaptor,
wherein the nozzle includes a first portion and a second portion, the first portion of the nozzle being connected to the adaptor via a nozzle mounting hole formed on the upper surface of the adaptor, the second portion being located above the first portion and connected to the first portion; and
the adaptor and the first portion of the nozzle are formed of quartz, and the second portion of the nozzle is formed of silicon carbide.
9. The heat treatment apparatus according to claim 8 , wherein the first portion of the nozzle and the second portion of the nozzle are fitted and connected and a part of the first portion of the nozzle is fitted into the second portion of the nozzle.
10. The heat treatment apparatus according to claim 8 , wherein a connected part of the first portion of the nozzle and the second portion of the nozzle is located below the lower end of the heater.
11. A method of manufacturing a substrate comprising:
loading the substrate into a reactor having a reaction tube, an adaptor for supporting the reaction tube, fully located below a lower end of the reaction tube and being formed of quartz, and a heater for heating an interior of the reaction tube, the heater being arranged around the reaction tube except for the adaptor;
treating the substrate by supplying treatment gas into the reactor by a nozzle, the nozzle being disposed on an upper surface of the adaptor, the nozzle including a first portion and a second portion, the first portion being connected to the adaptor via a nozzle mounting hole formed on the upper surface of the adaptor, the second portion located above the first portion and connected to the first portion, the first portion being formed of quartz and the second portion being formed of silicon carbide, the entire first portion being located below a lower end of the heater; and
unloading the substrate from the reactor after the treatment.
12. The method of manufacturing a substrate according to claim 11 , wherein a connected part of the first portion of the nozzle and the second portion of the nozzle is located below the lower end of the heater.
13. The heat treatment apparatus according to claim 1 , further comprising:
a gas introduction pipe that introduces gas to be supplied to the reaction tube; and
a gas supply port connected to the gas introduction pipe.