Granted Patent
Utility
US 6,686,281
· Confirmation No. 1087
METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE AND A SUBSTRATE PROCESSING APPARATUS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-12 | IFEE |
Issue Fee Payment (PTO-85B) | 2 | View | |
| 2002-09-05 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-09-05 | SPEC |
Specification | 19 | View | |
| 2002-09-05 | CLM |
Claims | 3 | View | |
| 2002-09-05 | ABST |
Abstract | 1 | View | |
| 2002-09-05 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2002-09-05 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Hirohisa Yamazaki
Tokyo, JAPAN
Takaaki Noda
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/680
C23C16/45574
H10P72/0402
C23C16/30
C23C16/45578
C30B25/02
C30B29/52
Y10S438/933
Y10S438/935
Y10S438/936
Prosecution
- Examiner
- KESHAVAN, BELUR V
- Art Unit
- 2825
- Docket No.
- YAMA3004/EM
- Confirmation No.
- 1087
Foreign Priority
2001-268265
·
2001-09-05
·
JAPAN
Publication
- Pub. No.
- US20030119288A1
- Pub. Date
- 2003-06-26
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-09-05
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Quick Facts
- Patent No.
- US 6,686,281
- App. No.
- 10/234,520
- Filed
- 2002-09-05
- Granted
- 2004-02-03
- Pub. No.
- US20030119288A1
- Examiner
- KESHAVAN, BELUR V
- Art Unit
- 2825
- PTA
- 0 days
External Links