Patent Assignment
Reel/Frame 013261/0816
Assignment of Assignor's Interest
Recorded: 2002-09-05
Pages: 3
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO, 164-8511, JAPAN
Covered Property
(1)
Method for Fabricating a Semiconductor Device and a Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.