Producing method of semiconductor device and substrate processing apparatus

1. A producing method of a semiconductor device, comprising:

transferring a plurality of substrates into a processing chamber;

supplying, in a state in which an inside of the processing chamber is heated and pressure in the processing chamber is lower than atmospheric pressure, oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by oxidation; and

transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein

in the oxidation-processing, the hydrogen-containing gas is supplied from a plurality of locations of a region which horizontally surrounds a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber, thereby allowing the oxygen-containing gas and the hydrogen-containing gas to react with each other at the plurality of locations of the region which horizontally surrounds the substrate arrangement region to generate a reaction species, and the oxidation-processing is performed with the reaction species; and

flow rates of the hydrogen-containing gas supplied from the plurality of locations are different from each other.

2. A producing method of a semiconductor device, as recited in claim 1 , wherein the hydrogen-containing gas is supplied through a porous nozzle provided at a side surface thereof with at least two holes.

3. A producing method of a semiconductor device as recited in claim 1 , wherein

the oxygen-containing gas is at least one of gases selected from the group consisting of oxygen gas and nitrous oxide gas, and the hydrogen-containing gas is at least one of gases selected from the group consisting of hydrogen gas, ammonia gas and methane gas.

4. A producing method of a semiconductor device as recited in claim 1 , wherein

a surface of said substrate includes different crystal orientation planes, or includes polycrystalline silicon or silicon nitride.

5. A producing method of a semiconductor device as recited in claim 1 , wherein

a flow rate of the oxygen-containing gas is larger than that of the hydrogen-containing gas.

6. A producing method of a semiconductor device as recited in claim 1 , wherein

in the oxidation-processing, a processing temperature is 500-1000° C. and a processing pressure is 1-1000 Pa.

7. A producing method of a semiconductor device, comprising:

transferring a plurality of substrates into a processing chamber;

supplying, in a state in which an inside of the processing chamber is heated and pressure in the processing chamber is lower than atmospheric pressure, oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by oxidation; and

transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein

in the oxidation-processing, the hydrogen-containing gas is supplied from a plurality of locations of a region which horizontally surrounds a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber, thereby allowing the oxygen-containing gas and the hydrogen-containing gas to react with each other at the plurality of locations of the region which horizontally surrounds the substrate arrangement region to generate a reaction species, and the oxidation-processing is performed with the reaction species; and

the hydrogen-containing gas is supplied through a plurality of nozzles having different lengths.

8. A producing method of a semiconductor device, comprising:

transferring a plurality of substrates into a processing chamber;

supplying, in a state in which an inner wall of the processing chamber and an inside of the processing chamber are heated and pressure in the processing chamber is lower than atmospheric pressure, oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by oxidation; and

transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein

in the oxidation-processing, the hydrogen-containing gas is supplied from a plurality of locations of a region which is in proximity to the inner wall of the processing chamber and horizontally surrounds a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber, thereby allowing the oxygen-containing gas and the hydrogen-containing gas to react with each other by heat of the inner wall of the processing chamber at the plurality of locations in proximity to the inner wall of the processing chamber to generate a reaction species, and the oxidation-processing is performed with the reaction species; and

flow rates of the hydrogen-containing gas supplied from the plurality of locations are different from each other.

9. A substrate processing apparatus, comprising:

a processing chamber which processes a plurality of substrates;

a heating source which heats an inside of the processing chamber;

a holding tool which holds the plurality of substrates in the processing chamber;

an oxygen-containing gas supply line which supplies oxygen-containing gas into the processing chamber;

a hydrogen-containing gas supply line which supplies hydrogen-containing gas into the processing chamber from a plurality of locations of a region which horizontally surrounds a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber;

an exhaust line which exhausts gas supplied into the processing chamber;

a pressure control device which controls pressure in the processing chamber; and

a control device which controls the heating source, the pressure control device, the oxygen-containing gas supply line and the hydrogen-containing gas supply line such that, in a state in which the inside of the processing chamber is heated and the pressure in the processing chamber is lower than atmospheric pressure, the oxygen-containing gas and the hydrogen-containing gas are supplied into the processing chamber to process the plurality of substrates by oxidation, the hydrogen-containing gas is supplied from the plurality of locations of the region which horizontally surrounds the substrate arrangement region, thereby allowing the oxygen-containing gas and the hydrogen-containing gas to react with each other at the plurality of locations of the region which horizontally surrounds the substrate arrangement region to generate a reaction species, and the oxidation-processing is performed with the reaction species, wherein

the hydrogen-containing gas supply line includes a plurality of nozzles having different lengths.

10. A substrate processing apparatus as recited in claim 9 , wherein

the hydrogen-containing gas supply line includes a plurality of independent supply lines,

the supply lines respectively includes mass flow controllers, and

the control device controls each of the mass flow controllers such that flow rates of the hydrogen-containing gas supplied from the plurality of supply locations are different from each other.

11. A substrate processing apparatus as recited in claim 9 , wherein

the oxygen-containing gas is at least one of gases selected from the group consisting of oxygen gas and nitrous oxide gas, and the hydrogen-containing gas is at least one of gases selected from the group consisting of hydrogen gas, ammonia gas and methane gas.

12. A substrate processing apparatus as recited in claim 9 , wherein

the control device controls the oxygen-containing gas supply line and the hydrogen-containing gas supply line such that a flow rate of the oxygen-containing gas is larger than that of the hydrogen-containing gas.

13. A substrate processing apparatus as recited in claim 9 , wherein

the control device controls the heating source and the pressure control device such that a processing temperature is 500-1000° C. and a processing pressure is 1-1000 Pa.

14. A substrate processing apparatus as recited in claim 9 , wherein

the hydrogen-containing gas supply line includes a porous nozzle provided at a side surface thereof with at least two holes.

15. A substrate processing apparatus, comprising:

a processing chamber which processes a plurality of substrates;

a heating source which heats an inner wall of the processing chamber and an inside of the processing chamber;

a holding tool which holds the plurality of substrates in the processing chamber;

an oxygen-containing gas supply line which supplies oxygen-containing gas into the processing chamber;

a hydrogen-containing gas supply line which supplies hydrogen-containing gas into the processing chamber from a plurality of locations of a region which is in proximity to the inner wall of the processing chamber and horizontally surrounds a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber;

an exhaust line which exhausts gas supplied into the processing chamber;

a pressure control device which controls pressure in the processing chamber; and

a control device which controls the heating source, the pressure control device, the oxygen-containing gas supply line and the hydrogen-containing gas supply line such that, in a state in which the inner wall of the processing chamber and the inside of the processing chamber are heated and the pressure in the processing chamber is lower than atmospheric pressure, the oxygen-containing gas and the hydrogen-containing gas are supplied into the processing chamber to process the plurality of substrates by oxidation, the hydrogen-containing gas is supplied from the plurality of locations, thereby allowing the oxygen-containing gas and the hydrogen-containing gas to react with each other by heat of the inner wall of the processing chamber at the plurality of locations in proximity to the inner wall of the processing chamber to generate a reaction species, and the oxidation-processing is performed with the reaction species, wherein

the hydrogen-containing gas supply line includes a plurality of nozzles having different lengths.

16. A producing method of a semiconductor device, comprising:

transferring a plurality of substrates into a processing chamber;

supplying, in a state in which an inner wall of the processing chamber and an inside of the processing chamber are heated and pressure in the processing chamber is lower than atmospheric pressure, oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by oxidation; and

transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein

in the oxidation-processing, the hydrogen-containing gas is supplied from a plurality of locations of a region which is in proximity to the inner wall of the processing chamber and horizontally surrounds a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber, thereby allowing the oxygen-containing gas and the hydrogen-containing gas to react with each other by heat of the inner wall of the processing chamber at the plurality of locations in proximity to the inner wall of the processing chamber to generate a reaction species, and the oxidation-processing is performed with the reaction species; and

the hydrogen-containing gas is supplied through a plurality of nozzles having different lengths.

17. A processing method of a substrate, comprising:

transferring a plurality of substrates into a processing chamber;

supplying, in a state in which an inside of the processing chamber is heated and pressure in the processing chamber is lower than atmospheric pressure, oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by oxidation; and

transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein

in the oxidation-processing, the hydrogen-containing gas is supplied from a plurality of locations of a region which horizontally surrounds a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber, thereby allowing the oxygen-containing gas and the hydrogen-containing gas to react with each other at the plurality of locations of the region which horizontally surrounds the substrate arrangement region to generate a reaction species, and the oxidation-processing is performed with the reaction species; and

flow rates of the hydrogen-containing gas supplied from the plurality of locations are different from each other.

18. A processing method of a substrate, comprising:

transferring a plurality of substrates into a processing chamber;

supplying, in a state in which an inside of the processing chamber is heated and pressure in the processing chamber is lower than atmospheric pressure, oxygen-containing gas and hydrogen-containing gas into the processing chamber to process the plurality of substrates by oxidation; and

transferring the plurality of the oxidation-processed substrates out from the processing chamber, wherein

in the oxidation-processing, the hydrogen-containing gas is supplied from a plurality of locations of a region which horizontally surrounds a substrate arrangement region in which the plurality of substrates are arranged in the processing chamber, thereby allowing the oxygen-containing gas and the hydrogen-containing gas to react with each other at the plurality of locations of the region which horizontally surrounds the substrate arrangement region to generate a reaction species, and the oxidation-processing is performed with the reaction species; and

the hydrogen-containing gas is supplied through a plurality of nozzles having different lengths.