IP Library › Granted Patent US 6,828,235
Granted Patent Utility
US 6,828,235 · Confirmation No. 3148

SEMICONDUCTOR MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS

Inventor: Satoshi Takano
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2005-06-10 COCOUT Certificate of Correction - Post Issue Communication 1 View
2005-04-28 IMIS Miscellaneous Internal Document 1 View
2005-04-26 COCX Supervisory Patent Examiner Response - Return for Certificate of Correction 1 View
2005-03-10 COCIN Request for Certificate of Correction 3 View
2004-08-11 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-08-11 1449 List of References cited by applicant and considered by examiner 2 View
2004-08-11 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-08-11 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-07-30 RUSH Printer Query form, used by the publications branch 1 View
2004-07-30 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2004-06-25 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-03-29 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-03-29 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-03-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-03-29 FWCLM Index of Claims 1 View
2004-03-29 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-11 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-03-11 FOR Foreign Reference 11 View
2004-03-11 FOR Foreign Reference 5 View
2004-03-11 FOR Foreign Reference 21 View
2004-03-11 FOR Foreign Reference 29 View
2004-01-05 RCEX Request for Continued Examination (RCE) 1 View
2003-12-11 CTAV Advisory Action (PTOL-303) 3 View
2003-12-03 N/AP Notice of Appeal Filed 1 View
2003-10-03 A.NE Response After Final Action 1 View
2003-10-03 CLM Claims 7 View
2003-10-03 REM Applicant Arguments/Remarks Made in an Amendment 14 View
2003-10-03 XT/ Extension of Time 1 View
2003-10-02 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-10-02 FOR Foreign Reference 10 View
2003-10-02 FOR Foreign Reference 32 View
2003-06-03 CTFR Final Rejection 8 View
2003-05-16 SA.. Supplemental Response or Supplemental Amendment 1 View
2003-05-16 CLM Claims 4 View
2003-05-16 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-04-07 LET. Miscellaneous Incoming Letter 1 View
2003-04-07 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-04-07 CLM Claims 5 View
2003-04-07 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-04-07 XT/ Extension of Time 1 View
2002-11-07 CTNF Non-Final Rejection 6 View
2002-11-07 NFDR Notice of Formal Drawings Required 1 View
2002-11-07 892 List of references cited by examiner 1 View
2002-11-07 1449 List of References cited by applicant and considered by examiner 1 View
2002-10-29 SRNT Examiner's search strategy and results 1 View
2002-08-13 ELC. Response to Election / Restriction Filed 2 View
2002-07-26 CTRS Requirement for Restriction/Election 4 View
2002-04-01 C.AD Change of Address 1 View
2001-07-30 LET. Miscellaneous Incoming Letter 3 View
2001-06-15 LET. Miscellaneous Incoming Letter 3 View
2001-06-15 OATH Oath or Declaration filed 3 View
2001-06-15 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2001-06-15 FOR Foreign Reference 19 View
2001-06-15 FOR Foreign Reference 12 View
2001-06-15 FOR Foreign Reference 11 View
2001-05-09 LET. Miscellaneous Incoming Letter 1 View
2001-05-09 OATH Oath or Declaration filed 3 View
2001-05-09 FRPR Certified Copy of Foreign Priority Application 23 View
2001-05-09 FRPR Certified Copy of Foreign Priority Application 33 View
2001-05-07 PEFN Pre-Exam Formalities Notice 1 View
2001-03-29 TRNA Transmittal of New Application 1 View
2001-03-29 ADS Application Data Sheet 1 View
2001-03-29 SPEC Specification 29 View
2001-03-29 CLM Claims 3 View
2001-03-29 ABST Abstract 1 View
2001-03-29 DRW Drawings-only black and white line drawings 7 View
2001-03-29 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-03-29 SRFW Search information including classification, databases and other search related notes 1 View
2001-03-29 FWCLM Index of Claims 1 View
2001-03-29 TRNA Transmittal of New Application 1 View
2001-03-29 DRW Drawings-only black and white line drawings 8 View
2001-03-29 SPEC Specification 30 View
2001-03-29 CLM Claims 3 View
2001-03-29 ABST Abstract 1 View
2001-03-29 WFEE Fee Worksheet (SB06) 1 View
2001-03-29 WFEE Fee Worksheet (SB06) 2 View
2001-03-29 WCLM Claims Worksheet (PTO-2022) 1 View
2001-03-29 ADS Application Data Sheet 1 View
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Quick Facts
Patent No.
US 6,828,235
App. No.
09/819,690
Filed
2001-03-29
Granted
2004-12-07
Pub. No.
US20020020344A1
Art Unit
2825
PTA
-222 days