Patent Assignment
Reel/Frame 011780/0538
Assignment of Assignor's Interest
Recorded: 2001-05-09
Pages: 2
Assignor
TAKANO, SATOSHI
Executed: 2001-04-20
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU, TOKYO 164-8511, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Method, Substrate Processing Method, and Semiconductor Manufacturing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.