Granted Patent
Utility
US 6,737,613
· Confirmation No. 4610
HEAT TREATMENT APPARATUS AND METHOD FOR PROCESSING SUBSTRATES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-04-02 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-03-25 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-03-25 | ADS |
Application Data Sheet | 4 | View | |
| 2003-03-25 | SPEC |
Specification | 26 | View | |
| 2003-03-25 | CLM |
Claims | 5 | View | |
| 2003-03-25 | ABST |
Abstract | 1 | View | |
| 2003-03-25 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2003-03-25 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Classification
USPC
219/390
H10P72/12
H10P72/0434
C30B31/10
Prosecution
- Examiner
- FUQUA, SHAWNTINA T
- Art Unit
- 3742
- Docket No.
- YAMA3007/EM
- Confirmation No.
- 4610
Foreign Priority
2002-085137
·
2002-03-26
·
JAPAN
Publication
- Pub. No.
- US20030183614A1
- Pub. Date
- 2003-10-02
Patent Term Adjustment
-31days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-12-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-03-25
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Quick Facts
- Patent No.
- US 6,737,613
- App. No.
- 10/395,179
- Filed
- 2003-03-25
- Granted
- 2004-05-18
- Pub. No.
- US20030183614A1
- Examiner
- FUQUA, SHAWNTINA T
- Art Unit
- 3742
- PTA
- -31 days
External Links