Method of manufacturing semiconductor device and substrate processing apparatus
View Patent ↗Formation of a boron compound is suppressed on the inner wall of a nozzle disposed in a high-temperature region of a process chamber. A semiconductor device manufacturing method comprises forming a boron doped silicon film by simultaneously supplying at least a boron-containing gas as a constituent element and a chlorine-containing gas a constituent element to a gas supply nozzle installed in a process chamber in a manner that concentration of chlorine (Cl) is higher than concentration of boron in the gas supply nozzle.
1. A method of manufacturing a semiconductor device, the method comprising:
loading a plurality of substrates into a process chamber,
wherein the plurality of substrates are stacked and held at a predetermined interval;
simultaneously supplying at least a boron-containing gas as a constituent element and a chlorine-containing gas as a constituent element to a gas supply nozzle installed in the process chamber,
wherein as a result of supplying the boron-containing gas and the chlorine-containing gas, a concentration of chlorine in the gas supply nozzle is higher than a concentration of boron in the gas supply nozzle, thereby generating a compound containing the boron and the chlorine in the gas supply nozzle;
forming boron-doped silicon films on the plurality of substrates by doping each of the plurality of substrates with the boron contained in the compound; and
unloading the plurality of substrates from the process chamber.
2. The method of claim 1 , wherein the chlorine-containing gas is supplied prior to forming the boron-doped silicon films.
3. The method of claim 1 , wherein the boron-doped silicon films are formed at a temperature ranging from 350° C. to 650° C.
4. A substrate processing apparatus comprising:
a process chamber configured to accommodate a plurality of substrates;
a heater configured to heat the plurality of substrates;
a gas supply unit comprising a gas supply nozzle configured to supply at least a silicon-containing gas as a constituent element, a boron-containing gas as a constituent element, and a chlorine-containing gas as a constituent element into the process chamber; and
a control unit configured to control the process chamber, the heater and the gas supply unit,
wherein the control unit controls the gas supply unit to simultaneously supply at least the boron-containing gas and the chlorine-containing gas to the gas supply nozzle installed in the process chamber,
wherein as a result of supplying the boron-containing gas and the chlorine-containing gas, a concentration of chlorine in the gas supply nozzle is higher than a concentration of boron in the gas supply nozzle, thereby generating a compound containing the boron and the chlorine in the gas supply nozzle,
wherein a boron-doped silicon film is formed on each of the plurality of substrates loaded in the process chamber by doping each of the plurality of substrates with the boron contained in the compound.
5. The method of claim 1 ,
wherein the boron-containing gas comprises B 2 H 6 , and the chlorine-containing gas comprises HCl, and
wherein, in the gas supply nozzle, a concentration of the HCl is at least six times higher than a concentration of the B 2 H 6 .