Patent Assignment
Reel/Frame 023864/0406
Assignment of Assignor's Interest
Recorded: 2010-01-28
Pages: 2
Assignors
MORIYA, ATSUSHI
Executed: 2009-12-21
MARUBAYASHI, TETSUYA
Executed: 2009-12-21
INOKUCHI, YASUHIRO
Executed: 2009-12-22
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.