Temperature regulating method, thermal processing system and semiconductor device manufacturing method

1. A semiconductor manufacturing method in a thermal processing apparatus comprising a heater for heating an interior of a process chamber to process a substrate, a first thermometer for detecting a temperature in the process chamber, and a second thermometer for detecting a temperature in the process chamber, the second thermometer being arranged in a position closer to the heater than the first thermometer, the semiconductor manufacturing method comprising:

a determination of, when the heater is controlled using a first output control pattern which includes an output amount by integral operation, an output amount by differential operation, and an output amount by a proportional operation in order that a temperature detected by the first thermometer becomes a target temperature from a temperature at a ramp-up start time, patterning at least a part of an operation amount of the heater by using a first heat amount to determine a second output control pattern, the first heat amount being obtained by subtracting an output amount based on the proportional operation from a second heat amount, the second heat amount being determined based on a temperature detected by the second thermometer and being defined at a period from the ramp-up start time to a time of maximum temperature, the operation amount of the heater being defined at the period; and

a processing of processing the substrate while controlling the heater by using the second output control pattern.

2. The semiconductor manufacturing method according to claim 1 , wherein the processing, in a period of ramp up to the target temperature, arithmetically operates the second operation amount on the basis of a result of proportional and differential operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the second operation amount arithmetically operated.

3. The semiconductor manufacturing method according to claim 1 , wherein

the processing, when being stabilized at the target temperature, arithmetically operates a second operation amount on a basis of a result of proportional, differential and integral operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the third operation amount arithmetically operated.

4. The semiconductor manufacturing method according to claim 1 , wherein

the processing, in a period of ramp up to the target temperature, arithmetically operates the second operation amount on the basis of a result of proportional and differential operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the second operation amount arithmetically operated, and

the processing, when being stabilized at the target temperature, arithmetically operates a third operation amount on a basis of a result of proportional, differential and integral operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the third operation amount arithmetically operated.

5. A semiconductor manufacturing method comprising:

a determination of determining a first output control pattern based on a temperature which is detected by a first thermometer when a heater for heating an interior of a process chamber is controlled, by using integral operation, differential operation and proportional operation in order that a temperature detected by the first thermometer becomes to a target temperature from a temperature at a ramp-up start time;

a patterning of, when the heater is controlled using the first output control pattern in order that a temperature detected by the first thermometer becomes the target temperature from a temperature at a ramp-up start time, patterning at least a part of an operation amount of the heater by using a first heat amount to determine a second output control pattern, the first heat amount being obtained by subtracting an output amount based on the proportional operation from a second heat amount, the second heat amount being determined based on a temperature detected by a second thermometer and being defined at a period from the ramp-up start time to a time of maximum temperature, the second thermometer being arranged in a position closer to the heater than the first thermometer, the operation amount of the heater being defined at the period; and

a processing of the substrate while controlling the heater by using the second output control pattern.

6. The semiconductor manufacturing method according to claim 5 , wherein the processing, in a period of ramp up to the target temperature, arithmetically operates the second operation amount on the basis of a result of proportional and differential operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the second operation amount arithmetically operated.

7. The semiconductor manufacturing method according to claim 5 , wherein

the processing, when being stabilized at the target temperature, arithmetically operates a second operation amount on a basis of a result of proportional, differential and integral operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the third operation amount arithmetically operated.

8. The semiconductor manufacturing method according to claim 5 , wherein

the processing, in a period of ramp up to the target temperature, arithmetically operates the second operation amount on the basis of a result of proportional and differential operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the second operation amount arithmetically operated, and

the processing, when being stabilized at the target temperature, arithmetically operates a third operation amount on a basis of a result of proportional, differential and integral operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the third operation amount arithmetically operated.

9. A temperature regulating method in a thermal processing apparatus comprising a heater for heating an interior of a process chamber to process a substrate, a first thermometer for detecting a temperature in the process chamber, and a second thermometer for detecting a temperature in the process chamber, the second thermometer being arranged in a position closer to the heater than the first thermometer, the temperature regulating method comprising:

a determination of, when the heater is controlled using a first output control pattern which includes an output amount by integral operation, an output amount by differential operation, and an output amount by a proportional operation in order that a temperature detected by the first thermometer becomes a target temperature from a temperature at a ramp-up start time, patterning at least a part of an operation amount of the heater by using a first heat amount so as to determine a second output control pattern, the first heat amount being obtained by subtracting an output amount based on the proportional operation from a second heat amount, the second heat amount being determined based on a temperature detected by the second thermometer and being defined at a period from the ramp-up start time to a time of maximum temperature, the operation amount of the heater being defined at the period; and

an output of the second output control pattern.

10. The temperature regulating method according to claim 9 , further comprising processing the substrate while controlling the heater by using the second output control pattern.

11. The temperature regulating method according to claim 10 , wherein the processing, in a period of ramp up to the target temperature, arithmetically operates the second operation amount on the basis of a result of proportional and differential operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the second operation amount arithmetically operated.

12. The temperature regulating method according to claim 10 , wherein the processing, when being stabilized at the target temperature, arithmetically operates a second operation amount on a basis of a result of proportional, differential and integral operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the third operation amount arithmetically operated.

13. The temperature regulating method according to claim 10 , wherein the processing, in a period of ramp up to the target temperature, arithmetically operates the second operation amount on the basis of a result of proportional and differential operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the second operation amount arithmetically operated, and

the processing, when being stabilized at the target temperature, arithmetically operates a third operation amount on a basis of a result of proportional, differential and integral operations and the second output control pattern by use of a result which is obtained by subtracting the temperature detected by the first thermometer from the target temperature, and controls the heater while performing proportional, differential and integral operations with using a result obtained by subtracting the temperature detected by the second thermometer from the third operation amount arithmetically operated.

14. The temperature regulating method according to claim 9 , wherein the output of the second output control pattern is provided to the heater.