IP Library › Granted Patent US 6,720,274
Granted Patent Utility
US 6,720,274 · Confirmation No. 4196

METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE AND A SUBSTRATE PROCESSING APPARATUS

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2006-03-20 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-01-29 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-12-01 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-01 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-12-01 892 List of references cited by examiner 1 View
2003-12-01 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-01 FWCLM Index of Claims 1 View
2003-12-01 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-06 SRNT Examiner's search strategy and results 1 View
2003-09-11 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-08-13 CTRS Requirement for Restriction/Election 4 View
2002-12-31 LET. Miscellaneous Incoming Letter 2 View
2002-12-31 PA.. Power of Attorney 2 View
2002-12-13 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-11-12 TRNA Transmittal of New Application 1 View
2002-11-12 ADS Application Data Sheet 4 View
2002-11-12 SPEC Specification 31 View
2002-11-12 CLM Claims 6 View
2002-11-12 ABST Abstract 1 View
2002-11-12 DRW Drawings-only black and white line drawings 13 View
2002-11-12 OATH Oath or Declaration filed 2 View
2002-11-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-11-12 SRFW Search information including classification, databases and other search related notes 1 View
2002-11-12 FWCLM Index of Claims 1 View
2002-11-12 TRNA Transmittal of New Application 1 View
2002-11-12 DRW Drawings-only black and white line drawings 13 View
2002-11-12 SPEC Specification 31 View
2002-11-12 CLM Claims 6 View
2002-11-12 ABST Abstract 1 View
2002-11-12 OATH Oath or Declaration filed 2 View
2002-11-12 WFEE Fee Worksheet (SB06) 1 View
2002-11-12 WFEE Fee Worksheet (SB06) 1 View
2002-11-12 FRPR Certified Copy of Foreign Priority Application 19 View
2002-11-12 FRPR Certified Copy of Foreign Priority Application 25 View
2002-11-12 ADS Application Data Sheet 4 View
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Quick Facts
Patent No.
US 6,720,274
App. No.
10/291,474
Filed
2002-11-12
Granted
2004-04-13
Pub. No.
US20030092283A1
Art Unit
2812
PTA
0 days