Substrate processing method and substrate processing apparatus
View Patent ↗A manufacturing method of a semiconductor device includes generating hydrogen radicals by plasma excitation of hydrogen gas and exposing a surface of a substrate on which silicon and metal are exposed to a reducing atmosphere created with the hydrogen radicals, and generating hydrogen radicals and hydroxyl radicals by plasma excitation of a mixed gas of hydrogen gas and oxygen-containing gas and oxidizing the silicon exposed on the surface of the substrate by exposing the surface of the substrate to the hydrogen radicals and hydroxyl radicals to obtain the substrate on which the metal and oxidized silicon are formed.
1. A manufacturing method of a semiconductor device comprising:
(a) generating hydrogen radicals by plasma excitation of hydrogen gas without oxygen gas and without an oxygen-containing gas and exposing a surface of a substrate on which a silicon surface and a metal surface are exposed to a reducing atmosphere created with the hydrogen radicals; and
(b) generating hydrogen radicals and hydroxyl radicals by plasma excitation of a mixed gas of hydrogen gas and oxygen gas or oxygen-containing gas and oxidizing the silicon surface exposed on the surface of the substrate by exposing the surface of the substrate to the hydrogen radicals and the hydroxyl radicals to obtain the substrate on which the metal surface and oxidized silicon surface are formed,
wherein the creation of the reducing atmosphere performed in (a) is maintained in (b) in a space where the substrate is exposed.
2. The manufacturing method of claim 1 , wherein the oxygen-containing gas is at least one selected from the group consisting of nitrous oxide gas (N 2 O), and nitric oxide (NO).
3. The manufacturing method of claim 1 , wherein
the hydrogen radicals are generated in (a) by plasma excitation of hydrogen gas supplied in a processing chamber where the substrate is processed, and
the hydrogen radicals and the hydroxyl radicals are generated in (b) by plasma excitation of the mixed gas supplied in the processing chamber.
4. The manufacturing method of claim 3 , wherein hydrogen gas is continuously supplied into the processing chamber while plasma excitation of gas in the processing chamber is performed.
5. The manufacturing method of claim 4 , wherein, a flow ratio of the oxygen gas or the oxygen-containing gas in a gas flow of the mixed gas gradually increases in (b).
6. The manufacturing method of claim 1 , wherein
the plasma excitation of the hydrogen gas, in (a) is caused by plasma discharge of the hydrogen gas in the processing chamber, and
the plasma excitation of the mixed gas in (b) is caused by plasma discharge of the mixed gas in the processing chamber.
7. The manufacturing method of claim 6 , wherein the hydrogen gas is continuously supplied in the processing chamber while the plasma discharge continues.
8. The manufacturing method of claim 7 , wherein, a flow ratio of the oxygen gas or the oxygen-containing gas in a gas flow of the mixed gas gradually increases in (b).
9. The manufacturing method of claim 1 , wherein, in oxidizing the silicon surface exposed on the surface of the substrate, the hydrogen radicals reduce the metal surface exposed on the surface of the substrate.
10. A manufacturing method of a semiconductor device comprising:
(a) generating hydrogen radicals by plasma excitation of hydrogen gas supplied in a processing chamber without oxygen gas and without an oxygen-containing gas and exposing a surface of a substrate on which a silicon surface and a metal surface are exposed to a reducing atmosphere created with the hydrogen radicals; and
(b) generating hydrogen radicals and hydroxyl radicals by plasma excitation of a mixed gas of hydrogen gas and oxygen gas or oxygen-containing gas supplied in the process chamber and oxidizing the silicon surface exposed on the surface of the substrate by exposing the surface of the substrate to the hydrogen radicals and hydroxyl radicals to obtain the substrate on which the metal surface and oxidized silicon surface are formed,
wherein (a) and (b) are sequentially performed without interruption, and the surface of the substrate is continuously exposed to the hydrogen radicals throughout (a) and (b).
11. The manufacturing method of claim 10 , wherein hydrogen gas is continuously supplied into the processing chamber while plasma excitation of gas in the processing chamber is performed.
12. A manufacturing method of a semiconductor device comprising:
(a) generating hydrogen radicals by plasma discharge of hydrogen gas in a processing chamber without oxygen gas and without an oxygen-containing gas and exposing a surface of a substrate on which a silicon surface and a metal surface are exposed to a reducing atmosphere created with the hydrogen radicals; and
(b) generating hydrogen radicals and hydroxyl radicals by plasma discharge of a mixed gas of hydrogen gas and oxygen gas or oxygen-containing gas in the process chamber and oxidizing the silicon surface exposed on the surface of the substrate by exposing the surface of the substrate to the hydrogen radicals and hydroxyl radicals to obtain the substrate on which the metal surface and oxidized silicon surface are formed,
wherein (a) and (b) are sequentially performed without interruption and the surface of the substrate is continuously exposed to the hydrogen radicals throughout (a) and (b).
13. The manufacturing method of claim 12 , wherein hydrogen gas is continuously supplied into the processing chamber while plasma discharge of gas in the processing chamber is performed.