Method of manufacturing a semiconductor device, method of processing a substrate, substrate processing apparatus, and recording medium
View Patent ↗Disclosed is a method of manufacturing a semiconductor device. The method includes forming a film containing carbon on a substrate by repeating a cycle plural times. The cycle includes: in a state in which a substrate housed in a processing chamber is heated, supplying an organic-based gas into the processing chamber and confining the organic-based gas inside the processing chamber; maintaining a state in which the organic-based gas is confined inside the processing chamber; and exhausting an inside of the processing chamber.
1. A method of manufacturing a semiconductor device comprising:
forming a film containing carbon on a substrate by repeating a cycle a plurality of times, wherein the cycle includes:
in a state in which a substrate housed in a processing chamber is heated, supplying an organic-based gas into the processing chamber and confining the organic-based gas inside the processing chamber, wherein the organic-based gas includes at least one gas selected from the group consisting of C x H 2x and C x H 2x+2 , wherein x is an integer greater than 4;
maintaining a state in which the organic-based gas is confined inside the processing chamber; and
exhausting an inside of the processing chamber,
wherein the film containing carbon is a film configured from carbon alone.
2. The method according to claim 1 , wherein in the forming of the film containing carbon, the substrate inside the processing chamber is heated to a temperature at which the organic-based gas thermally decomposes.
3. The method according to claim 1 , wherein the forming of the film containing carbon is performed in a non-plasma atmosphere.
4. The method according to claim 1 , wherein the forming of the film containing carbon includes a plurality of alternate repetitions of:
alternately performing, a specific number of times, the confining of the organic-based gas inside the processing chamber, and the maintaining of the state in which the organic-based gas is confined inside the processing chamber; and
exhausting the inside of the processing chamber.
5. The method according to claim 1 , wherein in the forming of the film containing carbon, the confining of the organic-based gas inside the processing chamber, the maintaining of the state in which the organic-based gas is confined inside the processing chamber, and the exhausting of the inside of the processing chamber are set as one cycle, and the cycle is repeated a plurality of times.
6. The method according to claim 1 , wherein in the forming of the film containing carbon, a plurality of alternate repetitions of the confining of the organic-based gas inside the processing chamber and the maintaining of the state in which the organic-based gas is confined inside the processing chamber, and one repetition of the exhausting of the inside of the processing chamber, are set as one cycle, and the cycle is repeated a plurality of times.
7. The method according to claim 1 , wherein the exhausting of the inside of the processing chamber is stopped in at least one of the confining of the organic-based gas inside the processing chamber or the maintaining of the state in which the organic-based gas is confined inside the processing chamber.
8. The method according to claim 1 , wherein in at least one of the confining of the organic-based gas inside the processing chamber or the maintaining the state in which the organic-based gas is confined inside the processing chamber, the exhausting of the inside of the processing chamber is performed while the organic-based gas is being supplied into the processing chamber, and at this time, a state is maintained in which an exhaustion rate of the organic-based gas from the inside of the processing chamber is lower than a supply rate of the organic-based gas into the processing chamber.
9. The method according to claim 1 , wherein:
in the confining of the organic-based gas inside the processing chamber, the organic-based gas and a hydrogen-containing gas are confined inside the processing chamber; and
in the maintaining of the state in which the organic-based gas is confined inside the processing chamber, a state is maintained in which the organic-based gas and the hydrogen-containing gas are confined inside the processing chamber.
10. The method according to claim 1 , wherein the film containing carbon is an amorphous carbon film.
11. A method of manufacturing a semiconductor device comprising:
forming a film containing carbon on a substrate by repeating a cycle a plurality of times, wherein the cycle includes:
in a state in which a substrate housed in a processing chamber is heated, supplying an organic-based gas into the processing chamber and confining the organic-based gas inside the processing chamber;
maintaining a state in which the organic-based gas is confined inside the processing chamber; and
exhausting an inside of the processing chamber,
wherein the organic-based gas includes at least one gas selected from the group consisting of butene (C 4 H 8 ), pentene (C 5 H 10 ), hexene (C 6 H 12 ), heptene (C 7 H 14 ), octene (C 8 H 16 ), pentane (C 5 H 10 ), hexane (C 6 H 14 ), heptane (C 7 H 16 ) and octane (C 8 H 18 ), and
wherein the film containing carbon is a film configured from carbon alone.
12. The method according to claim 1 , wherein in the forming of the film containing carbon, a temperature of the substrate is from 600° C. to 700° C.
13. A method of manufacturing a semiconductor device comprising:
forming a film containing carbon on a substrate by repeating a cycle a plurality of times, wherein the cycle includes:
in a state in which a substrate housed in a processing chamber is heated, supplying an organic-based gas into the processing chamber and confining the organic-based gas inside the processing chamber;
maintaining a state in which the organic-based gas is confined inside the processing chamber; and
exhausting an inside of the processing chamber,
wherein the film containing carbon is a film configured from carbon alone.
14. The method according to claim 13 , wherein the film containing carbon is an amorphous carbon film.
15. A method of processing a substrate comprising:
forming a film containing carbon on a substrate by repeating a cycle a plurality of times, wherein the cycle includes:
in a state in which a substrate housed in a processing chamber is heated, supplying an organic-based gas into the processing chamber and confining the organic-based gas inside the processing chamber, wherein the organic-based gas includes at least one gas selected from the group consisting of C x H 2x and C x H 2x+2 , wherein x is an integer greater than 4;
maintaining a state in which the organic-based gas is confined inside the processing chamber; and
exhausting an inside of the processing chamber,
wherein the film containing carbon is a film configured from carbon alone.